搜索

x
中国物理学会期刊

钒掺杂双层二硫化钼的结构及电学特性研究

Study on the structural and electrical properties of vanadium-doped bilayer MoS2

导出引用
  • 相比于单层二硫化钼(MoS2) ,双层MoS2凭借其层间相互作用,可表现出更高的迁移率和更小的带隙,被认为是下一代电子器件的理想沟道材料。通过置换掺杂调控双层MoS2性质是推动其走向实际应用的关键技术路径,然而,对其缺陷结构和层间相互作用的影响机制研究还有待深入。本文采用三源分流化学气相沉积方法制备了钒(V)掺杂双层MoS2薄膜,系统研究了V掺杂对双层薄膜缺陷结构、层间相互作用及电学性质的影响机制。研究发现,V掺杂可显著降低结构中S空位的形成能,并可形成VMo置换缺陷与S空位复杂缺陷结构,V掺杂量小于10%的双层MoS2薄膜材料依然可保持n型传导特性。尽管V掺杂未改变双层MoS2材料的载流子传输类型,但却显著增加了电子结合能和层间的Mo-S键,使AA和AB堆垛下的层间结合能分别增加了2.71%和2.44%,而层间耦合作用的增强,既减弱了载流子的散射,又延长了载流子的弛豫时间。测试发现,高栅压条件下,掺杂器件输出电流明显超过未掺杂器件,最终,掺杂器件在维持高开关比(~107)的同时,其高场电导率也明显得到提升。本研究不仅发展了双层MoS2的可控掺杂工艺,也为二维材料层间相互作用的精准调控开辟了新的技术路径。

    Compared with monolayer molybdenum disulfide (MoS2), bilayer MoS2 can exhibit higher carrier mobility and smaller band gap due to its unique interlayer interaction, and has better electron transport characteristics. It is considered to be an ideal channel material for the next generation of electronic devices. The precise regulation of the physical, chemical and electrical properties of bilayer MoS2 by doping is a key technical path to promote its practical application. However, the influence mechanism of doping on defect structure and interlayer interaction still needs to be further explored. In this paper, vanadium (V) doped bilayer MoS2 thin films were prepared by three-source shunt chemical vapor deposition. The effects of V doping on the defect structure, interlayer interaction and electrical properties of the bilayer films were systematically studied. It is found that V doping can significantly reduce the formation energy of S vacancies, and can form VMo substitution defects and S vacancy complex defect structures. This results in the fact that when the doping concentration of vanadium is less than 10%, the bilayer MoS2 film can still maintain the n-type conductive characteristics. Although V doping does not change the carrier transport type of the bilayer MoS2 material, it significantly increases the electron binding energy and the interlayer Mo-S bond, and increases the interlayer binding energy under AA and AB stacking by 2.71 % and 2.44 %, respectively. The enhancement of interlayer coupling not only weakens the scattering of carriers, but also prolongs the relaxation time of carriers. Consequently, under high gate voltage conditions, the drain current of the doped device is higher than that of the undoped device. Finally, the V-doped device maintains a high switching ratio (~107), and its high-field conductivity is also significantly improved. This study not only successfully developed the controllable doping process of bilayer MoS2, but also opened up a new technical path for the precise regulation of the interaction between the layers of two-dimensional materials, which has important theoretical guiding significance and practical application value for promoting the industrial application of two-dimensional MoS2-based electronic devices.

    目录

    返回文章
    返回
    Baidu
    map