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中国物理学会期刊

浪涌电流应力下肖特基型p-GaN HEMTs器件可靠性研究

Reliability Study of Schottky-Type p-GaN HEMTs under Surge Current Stress

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  • 氮化镓高电子迁移率晶体管(GaN HEMTs)凭借其高频、高功率密度和高效率等特性,已成为新一代电力电子领域的核心器件。然而,浪涌电流应力引起的可靠性问题仍是限制其进一步应用的重要因素。本文针对商用650 V肖特基型p-GaN栅极GaN HEMTs,系统研究了器件在第三象限工作条件下承受浪涌电流应力时的可靠性。通过实验测试获得了器件在10 ms、7 ms和5 ms浪涌脉宽下的浪涌电流耐受能力以及栅极漏电流变化规律。结果表明,浪涌脉宽减小可显著提升器件的浪涌电流耐受能力(最高提升约18.3%),减弱自热效应导致的迟滞现象,并减轻浪涌电流应力造成的器件栅极漏电流退化。通过多维失效分析及TCAD器件仿真,揭示了器件在浪涌电流应力下的失效机理:强电场导致栅极肖特基接触退化并引起栅极电流急剧增大,在强电场与过大栅极电流的共同作用下诱发栅极金属电迁移。本研究首次揭示了肖特基型p-GaN栅极GaN HEMTs在第三象限不同脉宽浪涌电流应力下的耐受能力及栅极漏电流退化,并发现了栅极肖特基接触退化引起金属电迁移的失效机理,为高可靠性GaN器件的设计与应用提供了重要参考。

    Gallium nitride high-electron-mobility transistors (GaN HEMTs), featuring high frequency, high power density, and superior efficiency, have become core devices in next-generation power electronics. However, in practical operating environments such as DC-DC converters or half-bridge circuits, GaN devices are frequently subjected to surge current stresses of varying magnitudes and pulse widths. The resulting reliability concerns, characterized by parameter degradation or even catastrophic device failure, remain a critical bottleneck limiting the widespread adoption of GaN technology. In this work, the reliability of a commercial 650 V Schottky-type p-GaN gate GaN HEMTs under surge current stress in the third-quadrant operation was systematically investigated. The surge current capability and gate leakage evolution of the devices were experimentally characterized under surge pulse widths of 10 ms, 7 ms, and 5 ms. The results indicate that a reduction in surge pulse width significantly enhances the device's surge current capability (with a maximum improvement of approximately 18.3%) and mitigates the hysteresis phenomenon induced by self-heating effects. Specifically, the hysteresis time decreased from 1.27 ms under a 10 ms pulse width to 0.46 ms under a 5 ms pulse width. Furthermore, the shorter pulse width alleviates the gate leakage current degradation caused by surge stress, with an overall reduction in the leakage current increment compared to longer pulse width. Through multi-dimensional failure analysis using OBIRCH, FIB, TEM, and EDS, complemented by TCAD simulations, the failure mechanism under surge current stress was elucidated. The intense electric field leads to the degradation of the gate Schottky contact, triggering a sharp increase in gate current. At the peak failure surge current, the gate current density reaches as high as 6.43×107 A/cm2. Ultimately, the synergistic effect of the strong electric field and excessive gate current induces electromigration of the gate metal, resulting in the formation of distinct voids at the original metal site. This study, for the first time, elucidates the surge current endurance and gate leakage degradation behavior of Schottky-type p-GaN gate GaN HEMTs under third-quadrant operation with varying surge pulse widths, and discovered the failure mechanism associated with Schottky contact degradation–induced metal electromigration, providing valuable insights for the design and application of high-performance GaN power devices.

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