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中国物理学会期刊

脉冲激光沉积ZnO过程中等离子体的发射光谱研究和纳米薄膜的表征

Study on the Emission Spectroscopy of Plasma and Characterization of Nanofilms During Pulsed Laser Deposition of ZnO

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  • 在脉冲激光沉积中,揭示等离子体参数与薄膜性能之间的内在关联性对于深入理解PLD物理机制具有重要意义,也是PLD技术研究的重要目标之一.本文系统的研究了不同激光能量(200-500 mJ)对ZnO靶烧蚀及纳米结构沉积的影响,利用光学发射光谱(OES)对激光诱导ZnO等离子体进行了诊断,分析了其电子密度(Te)和电子温度(Te)的时空演化规律.结合各种表征手段对所制备的ZnO薄膜的表面形貌、分子结构、结晶质量及紫外光电性能进行了系统评估.结果表明在300 mJ的激光能量下,等离子体电子密度的空间分布最为稳定,并且该条件下制备的薄膜表现出最优的紫外光电性能.这一结果显示,电子密度的空间分布稳定性与薄膜性能存在一定关联.

    To reveal the intrinsic correlation between plasma parameters and thin film properties, this study systematically investigates the regulatory effects of different laser energies (200–500 mJ) on the ablation behavior of ZnO targets and the deposition process of nanostructures. First, optical emission spectroscopy (OES) was employed to diagnose and analyze the spectral characteristics of ZnO plasma during pulsed laser deposition (PLD). The results show that under different laser energies, the evolution trends of plasma electron temperature and electron density are consistent, with only numerical differences; both parameters increase with the elevation of laser energy. Notably, when the laser energy is 300 mJ, the spatial distribution of plasma electron density exhibits the optimal uniformity and stability.Furthermore, the deposited thin films were systematically characterized using multi-dimensional characterization methods (including morphology, phase, optical, electrical, and ultraviolet (UV) optoelectronic performance tests). The results indicate that when the laser energy is 300 mJ, the crystallinity and UV optoelectronic performance of the prepared ZnO films reach the optimal level.Through the correlation analysis between plasma characteristics and film properties, it can be preliminarily inferred that there exists a distinct intrinsic correlation between the spatial distribution stability of plasma electron density and film properties during the PLD process. Although the universality of this conclusion still requires support from more experimental data, this study provides important theoretical and experimental references for the subsequent in-depth exploration of the interaction mechanism between plasma parameters and film properties.

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