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中国物理学会期刊

基于氮氧化钛的免掺杂电子选择接触及电镀铜电极在异质结晶硅太阳电池中的应用

Titanium oxynitride dopant-free electron-selective contact with copper electroplating in heterojunction crystalline silicon solar cell

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  • 光伏发电技术是实现“双碳”目标的重要路径, 目前光伏市场约95%份额由晶硅太阳电池占据, 但仍面临降本增效的问题. 基于宽带隙、非硅基的载流子选择性传输层及其构建的晶硅电池被认为是高效率、低成本候选者. 本文采用电子束蒸发制备了氮氧化钛(TiOxNy)薄膜, 并对其结构和光电性能进行表征分析. 结果表明, 该材料具备宽光学带隙(3.59 eV)、低功函数(4.27 eV)和低电阻率(1.3 Ω·cm)等特性, 并且与c-Si/i-a-Si:H的最优接触电阻率仅为17.9 mΩ·cm2, 是一种非常有潜力的电子选择性传输材料. 为进一步降低成本, 本工作在氮氧化钛上直接进行铜电镀金属化, 设计了正面无透明导电氧化物电极的异质结晶硅太阳电池, 获得了转换效率23.01%, 开路电压712.9 mV, 电流密度39.36 mA/cm2, 填充因子82.02%. 本文通过系统性表征和分析表明, 器件效率的提升归因于: 1)宽带隙TiOxNy电子选择性接触材料与MgF2减反射层组合, 替代常用ITO/μc-SiOx:H窗口层能有效降低寄生吸收; 2)优化的电镀铜工艺能显著降低接触电阻率, 有利于填充因子的提升. 上述研究为低成本、高效率的异质结晶硅太阳电池提供一种免掺杂材料和铜电镀结合的新型解决方案.

    The front surface design of crystalline silicon solar cells imposes numerous requirements on the electrical and optical properties of its materials. Dopant-free materials with wide-bandgaps represent a promising approach to reduce parasitic absorption and enhance photocurrent extraction. However, the application of dopant-free carrier selective contact layers necessitates systematic physical mechanism analysis of their upper and lower interfaces (passivation layer, metallization electrode, and anti-reflective coating), along with process-coordinated optical and electrical optimization. Additionally, copper-plated metallization grids are regarded as the mainstream technological approach for achieving cost reduction and efficiency enhancement in solar cells. However, wide-bandgap dopant-free materials, primarily oxides and fluorides, exhibit poor solution resistance or conductivity, rendering them incompatible with copper plating processes. This work employs electron beam evaporated TiOxNy films as a dopant-free electron-selective contact layer, featuring a wide bandgap (3.59 eV), low work function (4.27 eV), and low resistivity (1.3 Ω·cm). Due to TiOxNy’s low resistivity, copper plating metallization can be directly applied in a one-step onto the TiOxNy layer. The optimal contact resistance reached 17.9 mΩ·cm2, yielding cell performance with a conversion efficiency of 23.01%, open-circuit voltage of 712.9 mV, current density of 39.36 mA/cm2, and fill factor of 82.02%. Systematic characterization and physical mechanism analysis demonstrate that the enhanced device efficiency stems from: 1) Replacing n-type hydrogenated amorphous silicon with a dopant-free, electron-selective contact material effectively reduces parasitic absorption; 2) Optimizing the copper plating process significantly improves copper grid line contact to enhance contact resistivity. This provides a novel solution combining dopant-free materials and copper plating for low-cost, high-efficiency heterojunction crystalline silicon solar cells.

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