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中国物理学会期刊

水下脉冲火花放电在金属表面微纳结构制备中的应用

Application of Underwater Pulsed Spark Discharge in the Fabrication of Metallic Surface Micro/Nano Structures

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  • 金属表面微纳结构因其独特的物化特性,具有广泛的应用前景。为实现金属表面微纳结构的高通量、低成本与高精度制备,本文提出一种基于水下脉冲火花放电的冲击压印方法。以DVD聚碳酸酯薄膜为模具,在铝箔表面开展了冲击压印实验,系统研究了在充电电压固定为30 kV的条件下间隙距离对压印面积与结构保真度的影响;进一步地,建立了在不同间隙距离和充电电压条件下保真度与沉积能量之间的关系。结果表明,压印面积与结构保真度均随着间隙距离的增大而呈现先增加后减小的趋势,在间隙距离为3 mm时可在直径20 mm范围内实现大面积转印,最大保真度可达0.7,具有最优的压印效果;压印保真度与沉积能量呈分段线性关系,并且与电流第一半周期沉积能量的相关性大于总沉积能量。此外,存在保证有效压印的阈值能量(280 J)和保真度饱和的饱和阈值(380 J),需要保证电流第一半周期沉积能量略高于饱和阈值。本研究为金属表面功能性微纳结构的高效制备提供了一种新的技术途径。

    Metallic micro/nanostructured surfaces exhibit significant application potential due to their distinctive physicochemical properties. However, conventional fabrication techniques often suffer from a trade-off between production throughput and struc-tural accuracy. To address this challenge, this study presents a novel shock imprinting method based on underwater pulsed spark discharge (UPSD) induced shock waves. In this method, a DVD polycarbonate (PC) film with nano structures on its surface serves as the mold, and an aluminum foil acts as the workpiece. During the shock imprinting process, the foil is compressed into the mold via the shock wave of ultra high strain rate (~107 Pa·s-1) generated by UPSD, thereby fabricating nano structures onto the foil. Experimental results confirm the successful fabrication of micro/nano structures on aluminum foil using the proposed method.
    To systematically evaluate the imprinting performance (characterized by structural fidelity and imprinting area), the influence of the water gap distance was first inves-tigated. At a fixed charging voltage of 30 kV, both imprinting area and fidelity ex-hibit a non-monotonic trend with increasing gap distance, peaking at 3 mm. Under optima conditions, the proposed method can achieve large-area imprinting (20 mm diameter) with a maximum fidelity of 0.7. Meanwhile, repeated experiments under identical conditions reveal stochastic variation in imprinted height, attributed to the randomness of the discharge dynamics, likely associated with the stochastic streamer initiation and propagation. To further elucidate the dominant factors governing the imprinting fidelity, the correlation between fidelity and deposited energy was ana-lyzed derived from experiments with varying gap distances and charging voltages. Results indicate that the imprinting fidelity correlates more strongly with the first half-cycle deposited energy than with the total deposited energy. Furthermore, the imprinting fidelity exhibits a piecewise-linear rule as the first half-cycle deposited energy increased: below a threshold energy (~280 J), the imprinted height remains negligible (< 0.2) and beyond a saturation energy (~380 J), the fidelity plateaus at ~0.7 despite the deposited energy increased. Maintaining the deposited energy slightly above the saturation values is essential to achieve high-fidelity imprinting with enhanced energy efficiency.

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