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中国物理学会期刊

平面长腔GaN基垂直腔面发射激光器的器件制备与测试表征研究

Study on Device Fabrication and Performance Characterization of Planar Long-Cavity GaN-Based Vertical-Cavity Surface-Emitting Lasers

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  • 氮化镓(GaN)基垂直腔面发射激光器(VCSEL)因其低功耗、小发散角、圆形光束以及易于构建高密度二维阵列等优势,在新型显示和可见光通信等领域展现出巨大应用潜力。本文采用金属键合与激光剥离工艺制备了基于双介质布拉格反射镜的平面型GaN基长腔VCSEL器件,室温连续电流注入下表现出良好的热稳定性,实测热阻仅为349.9 K/W。在光泵浦测试下,器件在435.7 nm处出现明显的激射峰,半高宽约为0.45 nm。在脉冲电注入测试下,随着注入电流的增大,器件的发光光谱由多纵模逐渐演化为单纵模输出。其中,器件的阈值电流密度主要分布在45.3-107.9 kA/cm2之间,激射光谱的半高宽约为1 nm,并呈现轻微不对称性。进一步的远场测量表明光斑具有明显的双瓣结构,从侧面证实了电泵浦激射光谱中存在高阶横模叠加的特征。

    Gallium nitride (GaN)-based vertical-cavity surface-emitting lasers (VCSELs) have attracted considerable attention owing to their low power consumption, small beam divergence, circular beam profiles, and compatibility with high-density two-dimensional arrays. These advantages render them highly promising candidates for the applications of laser projection, retinal scanning and visible light communication. In this work, a long-cavity planar GaN-based VCSEL incorporating dual dielectric distributed Bragg reflectors was fabricated using metal bonding and laser lift-off processes. The current confinement apertures with diameters of 12 and 15 μm were employed to reduce the increased diffraction loss associated with the extended cavity length. Owing to the superior heat dissipation capability of the long-cavity structure and the larger current aperture, the device exhibited excellent thermal stability under continuous-wave current injection at room temperature, with a measured thermal resistance of 349.9 K/W, representing the lowest value reported to date. Under optical pumping, a pronounced lasing peak was observed at 435.7 nm, with a full width at half maximum of approximately 0.45 nm. Under pulsed electrical injection, the emission spectrum gradually evolved from multiple longitudinal modes to single-mode operation as the injection current increased. The threshold current densities ranged from 45.3 to 107.9 kA/cm2. The lasing spectrum exhibited a full width at half maximum of about 1 nm with slight asymmetry. Further far-field pattern measurements revealed distinct double-lobed beam profiles, indirectly confirming the presence of higher-order transverse mode superposition in the electrically pumped lasing spectrum. These results demonstrate that the proposed long-cavity device architecture constitutes an effective strategy for thermal management and diffraction-loss reduction, thereby providing a viable pathway toward the realization of high-performance GaN-based VCSELs with enhanced efficiency, stability, and practical applicability.

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