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中国物理学会期刊

β-Ga2O3/金刚石异质键合界面强度的晶向匹配依赖性

Dependence of Interfacial Bonding Strength on Crystallographic Matching in β-Ga2O3/Diamond Heterogeneous Bonding

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  • β-Ga2O3作为第四代半导体材料的代表,在功率器件中展现出巨大的应用潜力,然而,其极低的本征热导率限制了其在高功率密度器件中的进一步应用。近年来,通过将β-Ga2O3与高热导率材料(如金刚石)进行异质键合以提升散热性能,已成为一种重要的技术方向。然而,其界面微观演变及界面键合强度对晶向的依赖关系尚不明确,制约了键合工艺的优化与器件可靠性的提升。为此,本研究通过构建具备第一性原理精度的百万原子级数据集并拟合MTP势函数,系统地研究了界面键合强度的晶向依赖性。结果表明,所有弛豫后的键合界面均实现了原子级致密接触,且无明显缺陷。其中,β-Ga2O3(010)/金刚石(100)组合表现出最优的力学性能。本研究从原子尺度揭示了界面键合强度的晶向匹配依赖性,对于优化晶圆键合工艺、提升高功率器件的机械稳定性与长期可靠性具有重要的理论指导意义。

    As a representative fourth-generation ultra-wide-bandgap semiconductor, β-Ga2O3 has shown great promise for high-voltage, high-frequency, and high-power electronic devices because of its ultra-wide bandgap, high breakdown electric field, and low fabrication cost. However, its intrinsically low thermal conductivity makes it difficult to dissipate heat efficiently during device operation. This severely limits its performance and reliability under high power density. In recent years, heterogeneous bonding of β-Ga2O3 with high-thermal-conductivity materials such as diamond has emerged as an important strategy to overcome this thermal bottleneck. Such structures can potentially combine excellent electrical properties with efficient thermal management. However, the microscopic evolution of the β-Ga2O3/diamond interface and the crystal-orientation dependence of interfacial bonding strength remain unclear. This knowledge gap has hindered interface design, bonding process optimization, and reliability improvement. To address these issues, this study combined large-scale molecular dynamics simulations with density functional theory calculations. A million-atom training dataset with first-principles accuracy was constructed. Based on this dataset, a high-accuracy Moment Tensor Potential (MTP) was developed. Using the fitted potential, we systematically investigated the interfacial structural evolution of β-Ga2O3/diamond heterogeneous bonding models containing an amorphous transition layer during relaxation. We also examined how interfacial bonding strength depends on different crystal orientation combinations. The results show that, for all orientation combinations, the amorphous interlayer effectively relieves lattice mismatch and local stress concentration during relaxation. As a result, atomically dense contact is achieved at the bonded interface without obvious defects such as voids, cracks, or delamination. These findings indicate that the introduction of an amorphous interlayer improves interfacial structural integrity and bonding stability. Further mechanical analysis shows that the β-Ga2O3(010)/diamond(100) configuration exhibits the best interfacial bonding strength and overall mechanical performance, demonstrating a clear orientation-matching advantage. This work reveals, at the atomic scale, the evolution mechanism of β-Ga2O3/diamond heterogeneous bonding interfaces and the crystal-orientation dependence of their bonding strength. It provides important theoretical guidance for interface design, wafer bonding process optimization, and the improvement of mechanical stability and long-term reliability in high-power devices.

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