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中国物理学会期刊

氧气容性耦合放电中α/DA模式的电子能量输运

Electron Energy Transport in α/DA Modes of Oxygen Capacitively Coupled Discharges

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  • 外部电源(射频)产生的电磁场耦合给等离子体系统的能量,经带电粒子吸收后,在空间内发生输运和转化,最终通过边界损失或碰撞等过程耗散。本文基于粒子模拟,采用玻尔兹曼方程前三阶速度矩的自洽诊断方法建立电子总能量输运方程,并进一步分解得到电子流体动能(机械能)与热能(内能)输运方程,用以比较氧气容性耦合等离子体(Capacitively Coupled Plasmas,CCPs)中α模式和Drift-Ambipolar (DA)模式下能量从吸收到耗散的时空演化。研究发现,两种模式下时间平均的电子能流方向相反:在α模式下,电子主要在鞘层边缘吸收能量、获得定向动能,随后通过压力-应变相互作用和碰撞摩擦转化为热能,并由鞘层向体区输运,最终主要在体区通过电子-中性粒子非弹性碰撞耗散;在DA模式下,电子能量主要在体区的漂移电场和鞘层边缘的双极扩散场区域吸收,随后主要通过碰撞摩擦转化为热能,并由体区向鞘层方向输运。上述结果为理解氧气CCP在α/DA模式下的电子能量动力学及其差异提供了自洽的动理学依据。

    The energy coupled into the plasma system by external electromagnetic fields is absorbed by charged particles, then transported and converted in space, and finally dissipated through processes such as boundary loss and collisions. In this work, we investigate this complete energy dynamics in capacitively coupled oxygen discharges operating in two typical regimes, namely the α mode and the drift-ambipolar (DA) mode. Using particle-in-cell/Monte Carlo collision (PIC/MCC) simulations together with the first three velocity moments of the Boltzmann equation, we construct the transport equations for the total electron energy and further decomposes it into electron fluid kinetic energy (mechanical energy) and thermal energy (internal energy). The results show that electron energy dynamics differ fundamentally between the two modes. In α mode, electrons mainly absorb energy at the region of the expanding sheath and first gain directed kinetic energy, which is then converted locally into thermal energy through pressure-strain interaction and collisional friction. Since the electron kinetic energy remains largely confined to the sheath region, most of this energy is transported into bulk region in the form of heat flux and is gradually dissipated during this process through electron-neutral inelastic collisions. In DA mode, the enhanced electronegativity strongly modifies the spatial distribution of electron density, causing electron energy absorption to occur mainly in the drift field within the bulk and in the ambipolar field near the edge of the collapsing sheath. Because the pressure-strain effect is weakened in the bulk, the directed kinetic energy gained by electrons is only partly converted into thermal energy through collisional friction. As a result, electrons can convect both kinetic and thermal energy from the bulk toward the opposite sheath, where the energy is eventually dissipated through inelastic collisions. The above difference in energy dynamics originates from the electronegativity-induced reconstruction of the electric-field distribution, which reorganizes the spatial separation of electron energy absorption and loss. This not only alters the dominant pathway of kinetic-to-thermal energy conversion, but also ultimately reverses the direction of the electron energy flux. The present work provide a self-consistent kinetic basis for understanding the electron energy dynamics and their differences in oxygen CCPs in the α and DA modes.

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