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中国物理学会期刊

多沟道GaN HEMT自热效应的电热耦合模拟及场板结构优化

Electrothermal modeling of self-heating effects in multichannel GaN HEMTs and optimization of field plate structures

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  • 多沟道GaN HEMT器件通过垂直堆叠多个AlGaN/GaN异质结,在保障各沟道载流子迁移率的同时,提升器件2DEG的总浓度,进而增强器件的整体性能。但相较于单沟道器件,首先,多沟道器件在各沟道中形成分流,平均热流密度有所降低;其次,中部沟道的垂向散热条件变差,需要考虑沟道间的热耦合。为了综合考虑上述正、反作用对各沟道热影响的程度,需要建立了完备的电热耦合模型进行求解。本文采用漂移—扩散方程描述电学行为,结合导热方程描述热传导过程,二者通过迁移率对温度的依赖性实现双向耦合,模拟结果表明,温度最高的中间区域,自热效应导致的沟道内电流密度的降低不可忽略,构建的模型准确地表征了器件的电热分布特性。接下来,为抑制自热效应,针对电场强度最高的栅漏极区域,即热流密度最大的位置,基于所构建的电热耦合模型,探究了栅漏极区域四种不同场板结构的影响。对比发现,倾斜场板结构可有效抑制器件自热效应,其机制在于将一次大幅电势跃变分解为多个微小阶跃,从而有效降低栅漏极区域电场强度,显著抑制该区域热流密度。相较于无场板结构,在采用倾角6°、场板长度1.2 μm的优化参数后,沟道最高温度降低约6%,最大电场强度和热流密度下降约75%。本研究有助于深入理解多沟道GaN HEMT中的热电耦合效应,并为高热可靠性器件设计提供技术支撑。

    Multi-channel GaN HEMTs enhance the overall device performance by vertically stacking multiple AlGaN/GaN heterojunctions. This structure increases the total two-dimensional electron gas (2DEG) concentration while maintaining high mobility in each channel. However, it also introduces complex self-heating challenges. Although current sharing among multiple channels reduces the average heat flux per channel, the dense vertical stacking leads to significant inter-channel thermal coupling. This coupling particularly degrades heat dissipation in the middle channels, resulting in severe non-uniform temperature distribution. The gate-drain region sustains both high current density and high electric field, causing concentrated heat flux distribution and further aggravating self-heating effects. To address these issues, this work develops a bidirectional electro-thermal coupling model for multi-channel GaN HEMTs. The model self-consistently solves the drift-diffusion equations and the Fourier heat conduction equation. Bidirectional coupling is achieved by incorporating the temperature dependence of carrier mobility. This approach accurately characterizes the electro-thermal distribution of the device. Simulation results reveal significant vertical thermal coupling between adjacent channels. The middle channel exhibits the most severe temperature rise, with its temperature approximately 15-20 K higher than that of edge channels under typical operating conditions. Moreover, the current density degradation caused by self-heating in the hottest channel reaches a non-negligible level, fully demonstrating the necessity of coupled simulation. Based on the advantages of field plates in optimizing electric field distribution and improving breakdown voltage, this study further explores their feasibility in suppressing self-heating by modulating the channel electric field. The effects of four different gate-drain field plate structures on electric field and heat flux distribution are systematically evaluated. Results show that the slanted field plate is the most effective configuration. Its underlying mechanism is transforming the single large potential drop concentrated at the gate edge into multiple gradual steps along the channel. This smoothes the electric field distribution and significantly reduces the peak heat flux density. Through parametric optimization, an optimal configuration with a 6° slant angle and 1.2 μm length is identified. Compared to the structure without a field plate, this design reduces the peak electric field and peak heat flux density by approximately 75%. The maximum channel temperature decreases from 472.8 K to 461.9 K, a reduction of about 6%, while the device's electrical performance remains largely unaffected. This study provides critical insights into the unique electro-thermal coupling mechanisms in multi-channel GaN HEMTs. It also demonstrates that optimally designed slanted field plates offer an effective approach for enhancing the thermal reliability of high-performance GaN power devices.

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