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中国物理学会期刊

GaN肖特基势垒二极管的电热仿真及性能调控研究

Investigation of Electro-Thermal Simulation and Performance Control in GaN Schottky Barrier Diodes

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  • 电力器件作为电力电子系统的关键组成,已广泛服务于航空航天、电动汽车、高压直流/柔性交流输电、交直流电机与家用电器等领域。然而,受硅材料带隙窄与临界电场低的物理约束,硅基功率器件的综合性能已逼近材料极限。氮化镓(GaN)凭借宽禁带、高临界电场、优异热稳定性与高载流子饱和漂移速度等材料优势,成为新一代功率器件的重要候选。随着自支撑n型GaN衬底的成熟,全垂直GaN器件得到快速发展:在更小芯片面积与更优热管理条件下,可同时实现大电流与高击穿电压。在垂直GaN器件族中,垂直GaN肖特基势垒二极管(Schottky Barrier Diode,SBD)因低正向压降与快速开关而尤为突出。本文构建GaN SBD的物理模型并求解漂移–扩散方程,首先定量分析漂移层掺杂对器件正、反向特性的调控规律;随后考察不同环境温度下的正向导通行为,表征J–V特性的温度依赖;在此基础上引入merged pn-Schottky (MPS)结构,系统研究p区几何与掺杂参数对界面电场分布、正向导通与反向阻断能力的综合影响。研究结果为高性能、高耐压垂直GaN功率二极管的结构优化提供了方法路径与参数化设计依据。

    Power devices are key components in power electronic systems and are widely used in aerospace, electric vehicles, high-voltage DC/ flexible alternating current transmission systems, AC/DC motor drives, and household appliances. Limited by the narrow bandgap and low critical electric field of silicon, the performance of silicon-based power devices is approaching the material limit. Owing to its wide bandgap, high critical electric field, excellent thermal stability, and high carrier saturation velocity, gallium nitride (GaN) has become a promising material for next-generation power devices. With the development of free-standing n-type GaN substrates, fully vertical GaN devices have achieved rapid progress, featuring high current capability, high breakdown voltage, compact chip area, and improved thermal management. Among them, vertical GaN Schottky barrier diodes (SBDs) have attracted considerable attention because of their low forward voltage drop and fast switching characteristics. In this work, an electrothermal physical model for a vertical GaN SBD is established based on the drift-diffusion equations. The effects of drift-layer doping concentration on the forward and reverse characteristics are quantitatively analyzed, and the forward conduction behavior under different ambient temperatures is investigated to clarify the temperature dependence of the J-V characteristics. Furthermore, a merged pn-Schottky (MPS) structure is introduced, and the influences of p-region geometry and doping parameters on the electric-field distribution, forward conduction, and reverse blocking performance are systematically studied. The results provide theoretical support and design guidelines for the optimization of high-performance vertical GaN power diodes.

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