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中国物理学会期刊

垂直型GaN功率电子器件:结构、工艺与关键机制

Vertical GaN Power Electronic Devices: Structure, Fabrication and Key Mechanisms

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  • 相比于传统的基于异质外延材料的平面型GaN-on-Si器件,垂直型GaN-on-GaN功率电子器件具有厚度更大、品质更高的同质外延层,能够实现更高耐压、更高电流和更优异的动态性能,对拓展GaN功率电子器件的电压等级、功率等级具有重要意义。本文重点探讨了新型垂直结构GaN肖特基势垒二极管(SBD)、PiN二极管和沟槽栅MOSFET的相关研究,主要包括:(1)通过GaN特有的极化电荷和隧穿增强层新结构,在垂直型GaN SBD中同时实现耐压的提升和开启电压的降低;(2)基于直接带隙GaN的光电耦合效应,在双极型GaN PiN二极管中同时实现了电导调制和零反向恢复特性;(3)垂直型GaN二极管还展现出优异的动态电阻性能、浪涌耐量与抗高能质子辐照能力;(4)通过AIN插入层与优化的栅槽刻蚀工艺实现高迁移率高品质因数的垂直型GaN沟槽栅MOSFET。

    Compared with its lateral counterpart, vertical GaN-on-GaN device can extend the voltage/power ratings and yield superior dynamic performance, showing potential for high-frequency and high-efficiency power electronics applications. This work presents the recent advances in structure design, fabrication and key mechanisms of vertical GaN diodes and transistors, primarily including the follows: (1) By utilizing the tunneling-enhancement layer with polarization effects in GaN, the trade-off between forward conduction and reverse blocking capability in unipolar GaN diode can be optimized. (2) With photon recycling/re-absorption in the direct-bandgap GaN, the desirable conductivity modulation at on-state and zero reverse recovery during turn-off transient can be simultaneously achieved in bipolar GaN PiN diode. (3) Vertical GaN diodes exhibit current-collapse-free performance and superior surge current ruggedness. Moreover, ultrafast junction temperature mapping has been developed to identify the failure mechanism during surge current transients. (4) By virtue of an AlN interfacial-layer to suppress the interface traps and carrier scattering, vertical GaN trench MOSFET featuring a high inversion channel mobility and high Baliga’s figure-of-merit has been achieved.

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