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中国物理学会期刊

低压N型横向双扩散金属氧化物半导体场效应管的热载流子退化机理与优化设计

Hot-Carrier Degradation Mechanism and Optimization Design of Low-Voltage n-Channel Lateral Double-Diffused Metal-Oxide-Semiconductor Field-Effect Transistors

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  • 本文研究了一种 20 V 硅基横向双扩散金属氧化物半导体场效应管在热载流子注入效应下的退化机理,提出了具有孔场板的抑制热载流子注入 (Hot-Carrier Injection,HCI)结构以增强器件可靠性.孔场板位于器件漂移区的上方,旨在阻止漂移区表面出现电场尖峰,避免局部高碰撞电离使热电子或热空穴注入氧化层,有效抑制电学参数退化.对于本文研究的低压器件进行片上 HCI 退化测试,不同应力条件下热载流子退化机制不同,低 V_\mathrmgs 下,场氧化层中的热空穴注入和栅氧化层中的热电子注入共同导致退化;高 V_\mathrmgs \mathrmF ,热空穴的影响明显减弱.随着应力时间增加,热载流子注入逐渐饱和,界面态( N_\mathrmit )增加成为退化的主要因素.本文通过器件工艺仿真软件,研究器件在热载流子注入前后的电学特性,孔场板结构优化后,仿真得到在热点 \mathrmA 、 \mathrmC 附近 0.1 \mu \mathrm~m 范围内吸收 1 \times 10^9 \mathrm~cm^-2 剂量的电子 100,000 \mathrm~s 后的比导通电阻( R_\mathrmon, \mathrmsp )退化率相较于常规 LDMOS 分别降低了 64.9 \% 和 79.4 \% 。 孔场板结构有助于漂移区完全耗尽,可以在满足耐压的基础上实现更高浓度的漂移区掺杂,且工艺兼容性高.流片测试显示,孔场板结构 LDMOS 在 10,000 \mathrm~s 之后的 I_\text din 退化量较常规结构降低 62.2 \%, \mathrmBV 为 34 \mathrm~V, R_\mathrmon, \mathrmsp 为 6.9 \mathrm~m \Omega \cdot \mathrm~mm^2 ,其 FOM 值约为常规结构的 1.6 倍.不仅实现了 BV 和 R_\mathrmon, \mathrmsp 的良好折中,而且展现出了更好的 HCI 可靠性.

    In this work, the hot carrier injection (HCI) induced degradation mechanism of a 20 V silicon-based Lateral Double-Diffused Metal-OxideSemiconductor Field-Effect Transistor (LDMOS) is investigated. A contact field plate (CFP) structure compatible with 0.18 \mu \mathrm~m BCD process is proposed to suppress HCI and enhance the device's HCI reliability. The CFP is positioned atop the drift region to suppress surface electric field spikes, avoid hot electron and hot hole injection into the oxide layer caused by localized high impact ionization, and effectively mitigate the degradation of device electrical parameters. For the proposed low-voltage device, wafer-level HCI degradation tests were performed. Hot carrier injection in the channel region causes charge accumulation in the gate oxide, leading to a positive shift in V_\text th . Experimental results show that V_\text th increases under all stress conditions, and the V_\text th shift becomes more significant at higher V_\mathrmgs. Meanwhile, I_\text dlin decreases gradually; notably, I_\text dlin exhibits a slight positive shift at the initial stress stage under low V_\mathrmgs, followed by a continuous reduction. Sentaurus TCAD was used to analyze the electric field and impact ionization rate, investigate the HCI degradation mechanism, optimize the CFP structure parameters, and verify the performance advantages. Based on experimental data, the hot-carrier degradation mechanism differs under different stress conditions. At low V_\mathrmgs, degradation is dominated by both hot hole injection into the field oxide and hot electron injection into the gate oxide. At high V_\mathrmgs, the influence of hot holes is significantly weakened. With increasing stress time, hot carrier injection gradually saturates, and the generation of interface states ( N_\mathrmit ) becomes the main cause of device degradation.In this work, trap charges were introduced at the \mathrmSi / \mathrmSiO_2 interface in the TCAD simulation to investigate the electrical characteristics of the device before and after hot carrier injection. After optimizing the CFP structure, simulations show that the specific on-resistance ( R_\text on, sp ) degradation rate at hot spots of A and C (within a 0.1 \mu \mathrm~m range, subjected to an injected electron charge of 1 \times 10^9 \mathrm~cm^-2 for 100,000 \mathrm~s ) is reduced by 64.9 \% and 79.4 \%, respectively, compared with the conventional LDMOS. The CFP structure assists the drift region to achieve full depletion, enabling a higher drift region doping concentration while meeting the target breakdown voltage requirement. In terms of fabrication, the CFP etch process is fully compatible with the standard contact etch process in the 0.18 \mu \mathrm~m \mathrmBCD platform, requiring no additional masks or process modifications. Tape-out test results demonstrate that the I_\text din degradation of the CFP LDMOS after 10,000 \mathrm~s of stress is reduced by 62.2 \% relative to the conventional structure, with a breakdown voltage (BV) of 34 V and a R_\mathrmon, \mathrmsp of 6.9 \mathrm~m \Omega \cdot \mathrm~mm^2. The figure of merit (FOM) of the proposed device is approximately 1.6 times that of the conventional structure, demonstrating an excellent trade-off between BV and R_\mathrmon, \mathrmsp alongside superior HCI reliability.

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