欧佐元; 徐思志; 刘星; 高瑜博; 陈俊展; 和星宇; 卢浩天; 吴宠昊; 郭春雨; 郭丽; 吴旭; 吕启涛; 阮双琛

doi:10.7498/aps.74.20250247

摘要

全固态高功率深紫外激光器具有光子能量高、脉冲宽度短和空间分辨率优异等优点, 在科学研究和先进制造等领域展现出重要的应用价值. 本文基于自主研发的全固态Nd:YVO₄皮秒MOPA激光放大器(平均功率140 W、重复频率800 kHz、脉冲宽度8.33 ps), 开展了LBO和β-BBO晶体Ⅰ类相位匹配的腔外二倍频与四倍频研究. 双光子吸收是限制深紫外光功率进一步提升的关键因素, 通过研究高功率双波长激光在β-BBO晶体的透过率和温升, 发现高功率深紫外光在β-BBO晶体中存在较强的双光子吸收, 引发的热效应导致相位失配, 严重影响频率转换效率和输出稳定性. 为了进一步提高深紫外功率, 本文采用大尺寸光斑泵浦(光斑尺寸1.5 mm×1 mm) β-BBO晶体方案, 在泵浦峰值功率密度<1.11 GW/cm²的条件下, 有效地抑制了双光子吸收效应引起的热梯度, 实现了平均功率11 W的四倍频深紫外光输出, 单脉冲能量为13.75 μJ. 经过8 h运行, 功率抖动的均方根小于0.96%(@ 8 W). 该光源有望在超快精密加工和高次谐波产生等领域发挥重要作用.

关键词:

深紫外 /
皮秒激光 /
β-BBO /
四倍频

Abstract

Deep ultraviolet (DUV) picosecond lasers, operating in a 200–280 nm wavelength range, possess significant advantages, such as high photon energy and high resolution. These attributes make them highly promising for applications like semiconductor detection, ensuring the production of high-quality, defect-free semiconductor devices, as well as for advanced scientific research and industrial processing. High-power DUV picosecond lasers are typically generated via nonlinear frequency conversion of infrared lasers based on master oscillator power amplifier (MOPA) configurations. Among various DUV laser technologies, systems based on β-BBO crystals are particularly valuable due to their simple design and cost-effectiveness. However, the linear two-photon absorption, as well as the formation of dynamic color centers in BBO, are significant limitations for high-power, high-repetition-rate UV radiation, leading to thermal effects. Hence, it is important to carefully study the performance characteristics of BBO for high-power, high-repetition-rate pulse generation in the UV at 266 nm.This study presents a high-power, all-solid-state DUV picosecond laser developed using a 1064 nm Nd:YVO₄ MOPA amplification architecture. In this experimental setup, a 50 mW, 7.8 ps, 20 MHz all-fiber SESAM mode-locked laser is used as a seed source, achieving 140 W in amplified output power 8.33 ps in pulse duration at 1064 nm via MOPA. In the nonlinear frequency conversion process, the amplified laser pulses are initially focused onto an LBO crystal for secondary harmonic generation (SHG). Precise temperature control of the LBO crystal can generate a 532 nm output with 73 W in power and 6.93 ps in pulse duration, while achieving 52.64% in conversion efficiency. Two-photon absorption is a key factor limiting the further enhancement of deep ultraviolet (DUV) laser power. By investigating the transmittance and temperature rise of a high-power dual-wavelength laser in a β-BBO crystal, the results indicate that strong two-photon absorption occurs under high-power DUV irradiation. This absorption induces significant thermal effects, resulting in a temperature gradient within the crystal and leading to phase mismatch, which severely affects frequency conversion efficiency and output stability.To solve this problem and further increase the DUV output power, a large-spot pumping scheme (spot size: 1.5 mm × 1 mm) is adopted in this work. Under a pump peak power density of less than 1.11 GW/cm², the thermal gradient caused by two-photon absorption is effectively suppressed, achieving maximum fourth-harmonic output power of 11 W. The corresponding single-pulse energy reaches 13.75 μJ. The root mean square (RMS) jitter, measured in an 8-hour period, is less than 0.96%.This all-solid-state DUV laser demonstrates excellent performance characteristics, including high average power, stability, resolution, and peak power, making it a strong candidate for applications requiring efficient and high-precision processing or detection. By further increasing the pump power and optimizing the temperature control system, the output power of the laser can be significantly enhanced, thereby broadening its applicability and competitiveness in high-end fields such as semiconductor manufacturing, advanced research, and industrial processing.

Keywords:

作者及机构信息

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通信作者: 刘星, liuxingstart123@163.com

基金项目: 国家重点研发计划(批准号: 2022YFB3605800)、国家自然科学基金(批准号: 62275174, 62105225)、深圳市新引进高端人才财政补助科研启动项目(批准号: GDRC202106)、深圳市高等院校稳定支持计划(批准号: 20220719104008001, 20220718173849001)和深圳市科技重大专项(批准号: KJZD20240903100205008)资助的课题.

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Corresponding author: LIU Xing, liuxingstart123@163.com

Funds: Project supported by the National Key Research and Development Program of China (Grant No. 2022YFB3605800), the National Natural Science Foundation of China (Grant Nos. 62275174, 62105225), the Natural Science Foundation of Top Talent of Shenzhen Technology University, China (Grant No. GDRC202106), the Shenzhen University Stability Support Project, China (Grant Nos. 20220719104008001, 20220718173849001), and the Shenzhen Science and Technology Major Project, China (Grant No. KJZD20240903100205008).

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