Mask defects characterization techniques based on synchrotron radiation extreme ultraviolet light source

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ZHANG Zhihe; LIU Haigang; WANG Yong; TAI Renzhong

doi:10.7498/aps.74.20250864

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ZHANG Zhihe, LIU Haigang, WANG Yong, TAI Renzhong. Mask defects characterization techniques based on synchrotron radiation extreme ultraviolet light sourceJ. Acta Physica Sinica, 2025, 74(20): 200201. DOI: 10.7498/aps.74.20250864

Citation:

ZHANG Zhihe, LIU Haigang, WANG Yong, TAI Renzhong. Mask defects characterization techniques based on synchrotron radiation extreme ultraviolet light sourceJ. Acta Physica Sinica, 2025, 74(20): 200201. DOI: 10.7498/aps.74.20250864

Citation:

ZHANG Zhihe, LIU Haigang, WANG Yong, TAI Renzhong. Mask defects characterization techniques based on synchrotron radiation extreme ultraviolet light sourceJ. Acta Physica Sinica, 2025, 74(20): 200201. DOI: 10.7498/aps.74.20250864