Influence of pulse duration on plasma characteristics in HiPIMS discharge

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LI Jiale; HAN Mingyue; LUO Yang; WU Yiyan; YANG Hao; LI Liuhe

doi:10.7498/aps.75.20251748

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LI Jiale, HAN Mingyue, LUO Yang, WU Yiyan, YANG Hao, LI Liuhe. Influence of pulse duration on plasma characteristics in HiPIMS discharge. Acta Physica Sinica, 2026, 75(10): 100503. DOI: 10.7498/aps.75.20251748

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LI Jiale, HAN Mingyue, LUO Yang, WU Yiyan, YANG Hao, LI Liuhe. Influence of pulse duration on plasma characteristics in HiPIMS discharge. Acta Physica Sinica, 2026, 75(10): 100503. DOI: 10.7498/aps.75.20251748

Citation:

LI Jiale, HAN Mingyue, LUO Yang, WU Yiyan, YANG Hao, LI Liuhe. Influence of pulse duration on plasma characteristics in HiPIMS discharge. Acta Physica Sinica, 2026, 75(10): 100503. DOI: 10.7498/aps.75.20251748