Oxidation-mediated physical sputtering for atomically clean nanopatterning of PtSe<sub>2</sub>

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BAI Hui; ZHAO Xiaotong; LIU Ningning; FU Sibo; GENG Xiangshun; LU Hanxiao; HOU Yuanlang; ZHANG Jiemin; YANG Yi; LEI Ming; REN Tianling

doi:10.7498/aps.75.20260126

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中国物理学会期刊

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BAI Hui, ZHAO Xiaotong, LIU Ningning, FU Sibo, GENG Xiangshun, LU Hanxiao, HOU Yuanlang, ZHANG Jiemin, YANG Yi, LEI Ming, REN Tianling. Oxidation-mediated physical sputtering for atomically clean nanopatterning of PtSe2. Acta Physica Sinica, 2026, 75(12): 120805. DOI: 10.7498/aps.75.20260126

Citation:

BAI Hui, ZHAO Xiaotong, LIU Ningning, FU Sibo, GENG Xiangshun, LU Hanxiao, HOU Yuanlang, ZHANG Jiemin, YANG Yi, LEI Ming, REN Tianling. Oxidation-mediated physical sputtering for atomically clean nanopatterning of PtSe2. Acta Physica Sinica, 2026, 75(12): 120805. DOI: 10.7498/aps.75.20260126

Citation:

BAI Hui, ZHAO Xiaotong, LIU Ningning, FU Sibo, GENG Xiangshun, LU Hanxiao, HOU Yuanlang, ZHANG Jiemin, YANG Yi, LEI Ming, REN Tianling. Oxidation-mediated physical sputtering for atomically clean nanopatterning of PtSe2. Acta Physica Sinica, 2026, 75(12): 120805. DOI: 10.7498/aps.75.20260126