Influences of N<sub>2</sub> flow rate on the superconducting properties and dimensionality of epitaxial TiN thin films

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CHEN Shilong; LIU Yuchuan; SUN Yihui; WANG Xiaoni; PENG Wei; WU Yu; MU Gang; LIN Zhirong

doi:10.7498/aps.75.20260155

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CHEN Shilong, LIU Yuchuan, SUN Yihui, WANG Xiaoni, PENG Wei, WU Yu, MU Gang, LIN Zhirong. Influences of N2 flow rate on the superconducting properties and dimensionality of epitaxial TiN thin films. Acta Physica Sinica, 2026, 75(11): 110703. DOI: 10.7498/aps.75.20260155

Citation:

CHEN Shilong, LIU Yuchuan, SUN Yihui, WANG Xiaoni, PENG Wei, WU Yu, MU Gang, LIN Zhirong. Influences of N2 flow rate on the superconducting properties and dimensionality of epitaxial TiN thin films. Acta Physica Sinica, 2026, 75(11): 110703. DOI: 10.7498/aps.75.20260155

Citation:

CHEN Shilong, LIU Yuchuan, SUN Yihui, WANG Xiaoni, PENG Wei, WU Yu, MU Gang, LIN Zhirong. Influences of N2 flow rate on the superconducting properties and dimensionality of epitaxial TiN thin films. Acta Physica Sinica, 2026, 75(11): 110703. DOI: 10.7498/aps.75.20260155