Thin and uniform sources are always needed in β-spectroscopy. For this purpose, an apparatus of vacuum evaporation was designed, by mean of which sources such as In114,Au198 and Sm153 have been prepared. The souces of In114 were prepared respectively by the methods of drop evaporation and vacuum evaporation, and both were measured with the double focusing β-spectrometer and double lens β-spectrometer. Their internal conversion spectra were compared. The advantage of the method of vacuum evaporation is obvious. In addition, the Au198 K-conversion line of 411.8 KeV γ-ray and Sm153 K, LⅠ,LⅡ, LⅢ convertion lines of 69.67 KeV γ-ray measured with double focusing β-spectro-meter are given.