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Yu Yi-Ting, Yuan Wei-Zheng, Qiao Da-Yong, Liang Qing.A novel microstructure for in-situ measurement of residual stress in micromechanical thin films. Acta Physica Sinica, 2007, 56(10): 5691-5697.doi:10.7498/aps.56.5691 |
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