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Liu Hua-Song, Yang Xiao, Wang Li-Shuan, Jiang Cheng-Hui, Liu Dan-Dan, Ji Yi-Qin, Zhang Feng, Chen De-Ying.Gaussian oscillator model of the dielectric constant of SiO2 thin film in infrared range. Acta Physica Sinica, 2017, 66(5): 054211.doi:10.7498/aps.66.054211 |
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Yu Xiao-Zhu, Wang Ting-Ting, Ye Chao, Ning Zhao-Yuan.Effect of CH4-doping on configuration and dielectric properties of SiCOH low-k films. Acta Physica Sinica, 2005, 54(11): 5417-5421.doi:10.7498/aps.54.5417 |
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