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Li Liu-He, Liu Hong-Tao, Luo Ji, Xu Yi.Plasma distribution properties of vacuum ribbon-like cathodic arc plasma fliter and Raman studies of diamond-like carbon films perpared by it. Acta Physica Sinica, 2016, 65(6): 065202.doi:10.7498/aps.65.065202 |
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He Su-Ming, Dai Shan-Shan, Luo Xiang-Dong, Zhang Bo, Wang Jin-Bin.Preparation of SiON film by plasma enhanced chemical vapor deposition and passivation on Si. Acta Physica Sinica, 2014, 63(12): 128102.doi:10.7498/aps.63.128102 |
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Yang Fa-Zhan, Shen Li-Ru, Wang Shi-Qing, Tang De-Li, Jin Fa-Ya, Liu Hai-Feng.UV Raman and XPS studies of hydrogenous diamond-like carbon films prepared by PECVD. Acta Physica Sinica, 2013, 62(1): 017802.doi:10.7498/aps.62.017802 |
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Han Liang, Ning Tao, Liu De-Lian, He Liang.The study on the stress and the friction coefficient of tetrahedral amorphous carbon films bombarded by energetic Ar ion. Acta Physica Sinica, 2012, 61(17): 176801.doi:10.7498/aps.61.176801 |
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Liu Yan-Yan, Bauer-Grosse E., Zhang Qing-Yu.Structure and growth behavior of low N-doped diamond film by microwave plasma assisted chemical vapor deposition. Acta Physica Sinica, 2007, 56(4): 2359-2368.doi:10.7498/aps.56.2359 |
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Zeng Xiang－Bo, Liao Xian－Bo, Wang Bo, Diao Hong－Wei, Dai Song－Tao, Xiang Xian－Bi, Chang Xiu－Lan, Xu Yan－Yue, Hu Zhi－Hua, Hao Hui－Ying, Kong Guang－Lin.Boron-doped silicon nanowires grown by plasmaenhanced chemical vapor deposition. Acta Physica Sinica, 2004, 53(12): 4410-4413.doi:10.7498/aps.53.4410 |
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Yang Wu-Bao, Wang Jiu-Li, Zhang Gu-Ling, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze.Diamond-like carbon films deposited on optical glass substrate by using ECR microwave acetone plasma CVD method. Acta Physica Sinica, 2004, 53(9): 3099-3103.doi:10.7498/aps.53.3099 |
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Yang Hui-Dong, Wu Chun-Ｙa, Zhao Ying, Xue Jun-Ｍing, Geng Xin-Ｈua, Xiong Shao-Ｚhen.Investigation on the oxygen contamination in the μc-Si∶H thin film deposited b y VHF-PECVD. Acta Physica Sinica, 2003, 52(11): 2865-2869.doi:10.7498/aps.52.2865 |
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YE CHAO, NING ZHAO-YUAN, CHENG SHAN-HUA, KANG JIAN.STUDY ON α-C∶F FILMS DEPOSITED BY ELECTRON CYCLOTRONRESONANCE PLASMA CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica, 2001, 50(4): 784-789.doi:10.7498/aps.50.784 |
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JU JIAN-HUA, XIA YI-BEN, ZHANG WEI-LI, WANG LIN-JUN, SHI WEI-MIN, HUANG ZHI-MING, LI ZHI-FENG, ZHENG GUO-ZHEN, TANG DING-YUAN.EFFECT OF NITROGEN ON THE RESIDUAL STRESS AND ADHESION OF DIAMOND-LIKE AMORPHOUS CARBON NITRIDE FILMS. Acta Physica Sinica, 2000, 49(11): 2310-2314.doi:10.7498/aps.49.2310 |
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WANG GUAN-ZHONG, YE FENG, CHANG CHAO, ZHANG YING-HUI, FANG RONG-CHUAN.VARIOUS HYSTERESIS LOOPS AND MULTISTABILITY ON OUTPUT CURVES OF TUNABLE EXTERNAL CAVITY SEMICONDUCTOR LASERS. Acta Physica Sinica, 1999, 48(12): 2382-2388.doi:10.7498/aps.48.2382 |
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ZHANG ZHI-HONG, GUO HUAI-XI, YU FEI-WEI, XIONG QI-HUA, YE MING-SHENG, FAN XIANG-JUN.PREPARATION OF CUBIC C3N4 THIN FILMS BY LOW-PRESSURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica, 1998, 47(6): 1047-1051.doi:10.7498/aps.47.1047 |
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XIN YU, FAN SHU-PING, DI GUO-QING, SHEN MING-RONG, GAN ZHAO-QIANG.STUDIES OF CNx FILMS DEPOSITED BY MEANS OF MICROWAVE PLASMA CVD METHOD. Acta Physica Sinica, 1998, 47(1): 154-159.doi:10.7498/aps.47.154 |
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HAN LI, WANG XIAO-HUI, YU WEI, DONG LI-FANG, LI XIAO-WEI, FU GUANG-SHENG.CHARACTERIZATION STUDY OF TEXTURED DIAMOND FILMS GROWN ON SILICON (100) SUBSTRATE BY HOT FILAMENT CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica, 1997, 46(11): 2206-2214.doi:10.7498/aps.46.2206 |
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ZHANG YA-FEI, CHEN GUANG-HUA.A STUDY ON THE SURFACE COVERAGE OF THE CHEMICAL VAPOR DEPOSITED DIAMOND BY HYDROGEN ATOMS. Acta Physica Sinica, 1996, 45(3): 539-544.doi:10.7498/aps.45.539 |
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Wei He-Lin, Liu Zu-Li.. Acta Physica Sinica, 1995, 44(8): 1237-1243.doi:10.7498/aps.44.1237 |
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LIU XIANG-NA, WU XIAO-WEI, BAO XI-MAO, HE YU-LIANG.PHOTOLUMINESCENCE FROM NANO-CRYSTALLITES OF SILICON FILMS PREPARED BY PECVD. Acta Physica Sinica, 1994, 43(6): 985-990.doi:10.7498/aps.43.985 |
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LIAO KE-JUN, WANG WAN-LU.FRACTURE STRENGTH STUDIES OF POLYCRYSTALLINE DIAMOND FILMS PRODUCED BY DC PLASMA CVD. Acta Physica Sinica, 1994, 43(9): 1559-1563.doi:10.7498/aps.43.1559 |
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LIU ZU-LI, ZHU DA-QI, SONG WEN-DONG, CHEN JUN-FANG.A MASS TRANSFER MODEL FOR THE PLASMA DEPOSITION PROCESS IN AXIAL-FLOW REACTOR. Acta Physica Sinica, 1992, 41(4): 617-622.doi:10.7498/aps.41.617 |
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ZHANG FANG-QING, ZHANG YA-FEI, YANG YING-HU, LI JING-QI, CHEN GUANG-HUA, JIANG XIANG-LIU.PREPARATION OF DIAMOND FILMS BY DC ARC DISCHARGE AND IN SITU MEASUREMENTS OF THE PLASMA BY OPTICAL EMISSION SPECTRA. Acta Physica Sinica, 1990, 39(12): 1965-1969.doi:10.7498/aps.39.1965 |
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