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Chen Fu, Tang Wen-Xin, Yu Guo-Hao, Zhang Li, Xu Kun, Zhang Bao-Shun.Effect of U-shape trench etching process on electrical properties of GaN vertical trench metal-oxide-semiconductor field-effect transistor. Acta Physica Sinica, 2020, 69(9): 098501.doi:10.7498/aps.69.20191850 |
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Liang Qi, Wang Ru-Zhi, Yang Meng-Qi, Wang Chang-Hao, Liu Jin-Wei.Preparing GaN nanowires on Al2O3substrate without catalyst and its optical property. Acta Physica Sinica, 2020, 69(8): 087801.doi:10.7498/aps.69.20191923 |
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Ai Li-Qiang, Zhang Xiang-Xiong, Chen Min, Xiong Da-Xi.Deposition and thermal conductivity of diamond-like carbon film on a silicon substrate. Acta Physica Sinica, 2016, 65(9): 096501.doi:10.7498/aps.65.096501 |
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Tan Zai-Shang, Wu Xiao-Meng, Fan Zhong-Yong, Ding Shi-Jin.Effect of thermal annealing on the structure and properties of plasma enhanced chemical vapor deposited SiCOH film. Acta Physica Sinica, 2015, 64(10): 107701.doi:10.7498/aps.64.107701 |
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Jiang Jin-Long, Huang Hao, Wang Qiong, Wang Shan-Min, Wei Zhi-Qiang, Yang Hua, Hao Jun-Ying.Effect of deposition temperature on growth, structure and mechanical properties of diamond-like carbon films co-doped by titanium and silicon. Acta Physica Sinica, 2014, 63(2): 028104.doi:10.7498/aps.63.028104 |
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Yang Fa-Zhan, Shen Li-Ru, Wang Shi-Qing, Tang De-Li, Jin Fa-Ya, Liu Hai-Feng.UV Raman and XPS studies of hydrogenous diamond-like carbon films prepared by PECVD. Acta Physica Sinica, 2013, 62(1): 017802.doi:10.7498/aps.62.017802 |
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Lan Hui-Qing, Xu Cang.Molecular dynamics simulation on friction process of silicon-doped diamond-like carbon films. Acta Physica Sinica, 2012, 61(13): 133101.doi:10.7498/aps.61.133101 |
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Zhang Pei-Zeng, Li Rui-Shan, Xie Er-Qing, Yang Hua, Wang Xuan, Wang Tao, Feng You-Cai.The fabrication and field emission properties of ZnO nanoparticles-doped diamond-like carbon films by electrochemical deposition. Acta Physica Sinica, 2012, 61(8): 088101.doi:10.7498/aps.61.088101 |
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Yan Jian-Cheng, He Zhi-Bing, Yang Zhi-Lin, Zhang Ying, Tang Yong-Jian, Wei Jian-Jun.Influence of RF power on the structure and properties of glow discharge polymer. Acta Physica Sinica, 2011, 60(3): 036501.doi:10.7498/aps.60.036501 |
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Quan Wei-Long, Li Hong-Xuan, Ji Li, Zhao Fei, Du Wen, Zhou Hui-Di, Chen Jian-Min.Molecular dynamical simulation on the mechanical property of hydrogenated diamond-like carbon films. Acta Physica Sinica, 2010, 59(8): 5687-5691.doi:10.7498/aps.59.5687 |
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Li Hong-Kai, Lin Guo-Qiang, Dong Chuang.Composition, microstructure and properties of C-N-V films prepared by pulsed bias arc ion plating. Acta Physica Sinica, 2010, 59(6): 4296-4302.doi:10.7498/aps.59.4296 |
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Zhu Li, Jiang Mei-Fu, Ning Zhao-Yuan, Du Ji-Long, Wang Pei-Jun.Hydrophobic nature of fluorinated diamond-like carbon films prepared under different radio-frequency power. Acta Physica Sinica, 2009, 58(9): 6430-6435.doi:10.7498/aps.58.6430 |
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Kai Hua, Li Yun-Chao, Guo De-Cheng, Li Shuang, Li Zhi-Jie.Molecular dynamics simulation of the structure characteristic of diamond-like carbon films influence by oblique incidence ion-beam-assisted deposition. Acta Physica Sinica, 2009, 58(7): 4888-4894.doi:10.7498/aps.58.4888 |
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Xiao Jian-Rong, Xu Hui, Guo Ai-Min, Wang Huan-You.Study on FN-DLC thin films: (Ⅱ) effect of radio frequency power on the optical band gap of the thin films. Acta Physica Sinica, 2007, 56(3): 1809-1814.doi:10.7498/aps.56.1809 |
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Xiao Jian-Rong, Xu Hui, Guo Ai-Min, Wang Huan-You.Study of FN-DLC thin films: (Ⅰ) sp structure and chemical bond analysis. Acta Physica Sinica, 2007, 56(3): 1802-1808.doi:10.7498/aps.56.1802 |
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Ye Fan, Xie Er-Qing, Li Rui-Shan, Lin Hong-Feng, Zhang Jun, He De-Yan.Field emission properties of diamond-like carbon and carbon nitride films deposited by the electrochemical method. Acta Physica Sinica, 2005, 54(8): 3935-3939.doi:10.7498/aps.54.3935 |
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Yang Wu-Bao, Wang Jiu-Li, Zhang Gu-Ling, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze.Diamond-like carbon films deposited on optical glass substrate by using ECR microwave acetone plasma CVD method. Acta Physica Sinica, 2004, 53(9): 3099-3103.doi:10.7498/aps.53.3099 |
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Mei Xian-Xiu, Xu Jun, Ma Teng-Cai.. Acta Physica Sinica, 2002, 51(8): 1875-1880.doi:10.7498/aps.51.1875 |
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NING ZHAO-YUAN, CHENG SHAN-HUA, YE CHAO.CHEMICAL BONDING STRUCTURE OF FLUORINATED AMORPHOUS CARBON FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica, 2001, 50(3): 566-571.doi:10.7498/aps.50.566 |
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GUO DONG, CAI KAI, LI LONG-TU, GUI ZHI-LUN.ELECTRODEPOSITION OF DIAMOND-LIKE CARBON FILMS FROM ORGANIC SOLVENTS AND EFFECTS OF ANNEALING ON THE FILM STRUCTURE. Acta Physica Sinica, 2001, 50(12): 2413-2417.doi:10.7498/aps.50.2413 |
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