One_dimensional ions extraction and collection using the RF resonance method is studied by PIC-MCC simulation. The energy and angle distribution of extracted ions is recorded and the sputtering loss is calculated. The results show that compared with parallel electrode method, RF resonance method has advantages such as shorter extraction time, lower collision loss and sputtering loss and higher col lection ratio; the extraction time and collision loss are decreased with increas ing extraction voltage, but the sputtering loss increases and collection ratio d ecreases; collision loss is decreased with increasing magnetic field, but the sp uttering loss increases and collection ratio decreases.