This paper studies the X-ray spectra produced by the interaction of highly charged ions of Arq+(q=16,17,18) with metallic surface of Be, Al, Ni, Mo and Au respectively. The experimental results show that the Kα　X-ray emerges from under the surface of solid in the interaction of ions with targets. The multi-electron excitation occurred in the process neutralization of the Ar16+　in electronic configuration of 1s2 in metallic surfaces, which produces vacancy in the K shell. Electron from high n state transition to K vacancy gives off X-ray. We find that there is no obvious relation between the shape of X-ray spectra and the different targets. The X-ray yield of incident ions are associated with initial electronic configuration. The X-ray yield of target is related to the kinetic energy of the incidentions.