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He Su-Ming, Dai Shan-Shan, Luo Xiang-Dong, Zhang Bo, Wang Jin-Bin.Preparation of SiON film by plasma enhanced chemical vapor deposition and passivation on Si. Acta Physica Sinica, 2014, 63(12): 128102.doi:10.7498/aps.63.128102 |
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Fang Jia, Li Shuang-Liang, Xu Sheng-Zhi, Wei Chang-Chun, Zhao Ying, Zhang Xiao-Dan.Analysis on steady plasma process of high-rate microcrystalline silicon by optical emission spectroscopy. Acta Physica Sinica, 2013, 62(16): 168103.doi:10.7498/aps.62.168103 |
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Li Xin-Li, Gu Jin-Hua, Gao Hai-Bo, Chen Yong-Sheng, Gao Xiao-Yong, Yang Shi-E, Lu Jing-Xiao, Li Rui, Jiao Yue-Chao.Real time and ex situ spectroscopic ellipsometry analysis microcrystalline silicon thin films growth. Acta Physica Sinica, 2012, 61(3): 036802.doi:10.7498/aps.61.036802 |
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Hou Guo-Fu, Xue Jun-Ming, Yuan Yu-Jie, Zhang Xiao-Dan, Sun Jian, Chen Xin-Liang, Geng Xin-Hua, Zhao Ying.Key issues for high-efficiency silicon thin film solar cells prepared by RF-PECVD under high-pressure-depletion conditions. Acta Physica Sinica, 2012, 61(5): 058403.doi:10.7498/aps.61.058403 |
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Gao Hai-Bo, Li Rui, Lu Jing-Xiao, Wang Guo, Li Xin-Lin, Jiao Yue-Chao.High-rate deposition of microcrystalline silicon thin film by multi-step method. Acta Physica Sinica, 2012, 61(1): 018101.doi:10.7498/aps.61.018101 |
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Li Tian-Wei, Liu Feng-Zhen, Zhu Mei-Fang.rf excited optical emission spectrum of radicals generated during hot wire chemical vapour deposition for the preparation of microcrystalline silicon thin film. Acta Physica Sinica, 2011, 60(1): 018103.doi:10.7498/aps.60.018103 |
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Zheng Xin-Xia, Zhang Xiao-Dan, Yang Su-Su, Wang Guang-Hong, Xu Sheng-Zhi, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying.a-Si ∶H/a-Si ∶H/μc-Si ∶H triple junction solar cells. Acta Physica Sinica, 2011, 60(6): 068801.doi:10.7498/aps.60.068801 |
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Ding Yan-Li, Zhu Zhi-Li, Gu Jin-Hua, Shi Xin-Wei, Yang Shi-E, Gao Xiao-Yong, Chen Yong-Sheng, Lu Jing-Xiao.Effect of deposition rate on the scaling behavior of microcrystalline silicon films prepared by very high frequency-plasma enhanced chemical vapor deposition. Acta Physica Sinica, 2010, 59(2): 1190-1195.doi:10.7498/aps.59.1190 |
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Lu Peng, Hou Guo-Fu, Yuan Yu-Jie, Yang Rui-Xia, Zhao Ying.Influence of n-type layer structure on performance and light-induced degradation of n-i-p microcrystalline silicon solar cells. Acta Physica Sinica, 2010, 59(6): 4330-4336.doi:10.7498/aps.59.4330 |
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Peng Wen-Bo, Liu Shi-Yong, Xiao Hai-Bo, Zhang Chang-Sha, Shi Ming-Ji, Zeng Xiang-Bo, Xu Yan-Yue, Kong Guang-Lin, Yu Yu-De.Gap states and microstructure of microcrystalline silicon thin films. Acta Physica Sinica, 2009, 58(8): 5716-5720.doi:10.7498/aps.58.5716 |
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Zhang Yong, Liu Yan, Lü Bin, Tang Nai-Yun, Wang Ji-Qing, Zhang Hong-Ying.Influence of barrier height of the front contact on the amorphous silicon and microcrystalline silicon heterojunction solar cells. Acta Physica Sinica, 2009, 58(4): 2829-2835.doi:10.7498/aps.58.2829 |
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Sun Fu-He, Zhang Xiao-Dan, Wang Guang-Hong, Xu Sheng-Zhi, Yue Qiang, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying.Influence of boron on the properties of intrinsic microcrystalline silicon thin films. Acta Physica Sinica, 2009, 58(2): 1293-1297.doi:10.7498/aps.58.1293 |
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Han Xiao-Yan, Geng Xin-Hua, Hou Guo-Fu, Zhang Xiao-Dan, Li Gui-Jun, Yuan Yu-Jie, Wei Chang-Chun, Sun Jian, Zhang De-Kun, Zhao Ying.An optical emission spectroscopy study on the high rate growth of microcrystalline silicon films. Acta Physica Sinica, 2009, 58(2): 1344-1347.doi:10.7498/aps.58.1344 |
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Han Xiao-Yan, Hou Guo-Fu, Wei Chang-Chun, Zhang Xiao-Dan, Dai Zhi-Hua, Li Gui-Jun, Sun Jian, Chen Xin-Liang, Zhang De-Kun, Xue Jun-Ming, Zhao Ying, Geng Xin-Hua.Optimization of high rate growth high quality μc-Si:H thin films and its application to the solar cells. Acta Physica Sinica, 2009, 58(6): 4254-4259.doi:10.7498/aps.58.4254 |
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Guo Xue-Jun, Lu Jing-Xiao, Chen Yong-Sheng, Zhang Qing-Feng, Wen Shu-Tang, Zheng Wen, Shen Chen-Hai, Chen Qing-Dong.Research on the high-rate deposition of μc-Si:H by VHF-PECVD. Acta Physica Sinica, 2008, 57(9): 6002-6006.doi:10.7498/aps.57.6002 |
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Hou Guo-Fu, Xue Jun-Ming, Sun Jian, Guo Qun-Chao, Zhang De-Kun, Ren Hui-Zhi, Zhao Ying, Geng Xin-Hua, Li Yi-Gang.Research on silane depletion status during the deposition of silicon thin films by high-pressure PECVD. Acta Physica Sinica, 2007, 56(2): 1177-1181.doi:10.7498/aps.56.1177 |
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Yu Yun-Peng, Lin Xuan-Ying, Lin Shun-Hui, Huang Rui.Influence of light exposure and applied bias on the conductivity of microcrystalline silicon films at room temperature. Acta Physica Sinica, 2006, 55(4): 2038-2043.doi:10.7498/aps.55.2038 |
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Gao Xiao-Yong, Li Rui, Chen Yong-Sheng, Lu Jing-Xiao, Liu Ping, Feng Tuan-Hui, Wang Hong-Juan, Yang Shi-E.Study of the structural and optical properties of microcrystalline silicon film. Acta Physica Sinica, 2006, 55(1): 98-101.doi:10.7498/aps.55.98 |
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Zhang Xiao-Dan, Zhao Ying, Gao Yan-Tao, Zhu Feng, Wei Chang-Chun, Sun Jian, Wang Yan, Geng Xin-Hua, Xiong Shao-Zhen.Study of microcrystalline silicon solar cells fabricated by very high frequency plasma-enhanced chemical vapor deposition. Acta Physica Sinica, 2005, 54(4): 1899-1903.doi:10.7498/aps.54.1899 |
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Zhang Xiao-Dan, Zhao Ying, Zhu Feng, Wei Chang-Chun, Wu Chun-Ya, Gao Yan-Tao, Hou Guo-Fu, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen.A study of Raman and optical emission spectroscopy on microcrystalline silicon films deposited by VHF-PECVD. Acta Physica Sinica, 2005, 54(1): 445-449.doi:10.7498/aps.54.445 |
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