The resistivity, soft magnetic properties and microwave permeability of multilayer nanogranular films suitable for high frequency applications have been investigated in this work. These films were prepared by repeated sequential depositions of thin layers of Co40Fe40B20 and SiO2. After vacuum annealing at 250℃ under a uniform in-plane magnetic field of 100kA/m for 2h, the Co40Fe40B20/SiO2 multilayer films have the hard axis coercivity of 210A/m, saturation magnetization of 838.75kA/m, resistivity of 2.06×103μΩcm. Moreover, the results show that the films have an in-plane uniaxial anisotropy of 2.78kA/m. As a consequence, the real part of measured permeability keeps constant at 125 up to 1.6GHz. The resonance frequency was about1.73GHz.