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Li Sang-Ya, Zhang Ai-Lin, Xu Xin, Lü Tao, Wang Shi-Kang, Luo Qing.Uniformity optimization of ion beam sputtering coating equipment based on strong current ion source. Acta Physica Sinica, 2024, 73(5): 058101.doi:10.7498/aps.73.20231491 |
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Zhang Xin-Xin, Jin Ying-Xia, Ye Xiao-Song, Wang Chong, Yang Yu.Study on the annealing growth of Ge dots at high deposition rate by using magnetron sputtering technique. Acta Physica Sinica, 2014, 63(15): 156802.doi:10.7498/aps.63.156802 |
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Huang Cheng-Long, Zhang Ji-Cheng, Diao Kai-Di, Zeng Yong, Yi Yong, Cao Lei-Feng, Wang Hong-Bin.Fabrication and optical property characterization of quantum-dot-array diffraction grating with single order diffraction based on focused ion beam. Acta Physica Sinica, 2014, 63(1): 018101.doi:10.7498/aps.63.018101 |
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Ye Ying, Zhou Wang-Min.Influences of growth orientation on strain and strain relaxation of quantum dots. Acta Physica Sinica, 2013, 62(5): 058105.doi:10.7498/aps.62.058105 |
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Liu Hua-Song, Ji Yi-Qin, Jiang Yu-Gang, Wang Li-Shuan, Leng Jian, Sun Peng, Zhuang Ke-Wen.Study on internal short-range order microstructure characteristic of SiO2 thin film. Acta Physica Sinica, 2013, 62(18): 187801.doi:10.7498/aps.62.187801 |
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Xiong Fei, Yang Jie, Zhang Hui, Chen Gang, Yang Pei-Zhi.Growth evolution of Ge quantum dot modulated by the atom bombardment during ion beam sputtering deposition. Acta Physica Sinica, 2012, 61(21): 218101.doi:10.7498/aps.61.218101 |
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Fan Ping, Cai Zhao-Kun, Zheng Zhuang-Hao, Zhang Dong-Ping, Cai Xing-Min, Chen Tian-Bao.Fabrication and characterization of Bi-Sb-Te based thin film thermoelectric generator prepared by ion beam sputtering deposition. Acta Physica Sinica, 2011, 60(9): 098402.doi:10.7498/aps.60.098402 |
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Yuan Wen-Jia, Zhang Yue-Guang, Shen Wei-Dong, Ma Qun, Liu Xu.Characteristics of Nb2O5 thin films deposited by ion beam sputtering. Acta Physica Sinica, 2011, 60(4): 047803.doi:10.7498/aps.60.047803 |
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Xiong Fei, Pan Hong-Xing, Zhang Hui, Yang Yu.Growth of Ge quantum dot at the mix-crystal interface self-induced on the ion beam sputtering deposition. Acta Physica Sinica, 2011, 60(8): 088102.doi:10.7498/aps.60.088102 |
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Zhang Xue-Gui, Wang Chong, Lu Zhi-Quan, Yang Jie, Li Liang, Yang Yu.Evolution of Ge/Si quantum dots self-assembledgrown by ion beam sputtering. Acta Physica Sinica, 2011, 60(9): 096101.doi:10.7498/aps.60.096101 |
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Fan Ping, Zheng Zhuang-Hao, Liang Guang-Xing, Zhang Dong-Ping, Cai Xing-Min.Preparation and characterization of Sb2Te3 thermoelectric thin films by ion beam sputtering. Acta Physica Sinica, 2010, 59(2): 1243-1247.doi:10.7498/aps.59.1243 |
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.Properties of Co nano-films deposited on monocrystalline silicon surface by ion beam sputtering. Acta Physica Sinica, 2007, 56(12): 7158-7164.doi:10.7498/aps.56.7158 |
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Cai Cheng-Yu, Zhou Wang-Min.The strain distribution and equilibrium morphology of Ge/Si semiconductor quantum dot. Acta Physica Sinica, 2007, 56(8): 4841-4846.doi:10.7498/aps.56.4841 |
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Zhang Dong-Ping, Qi Hong-Ji, Shao Jian-Da, Fan Rui-Ying, Fan Zheng-Xiu.Mechanism of nodule growth in ion beam sputtering films. Acta Physica Sinica, 2005, 54(3): 1385-1389.doi:10.7498/aps.54.1385 |
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Mu Zong-Xin, Li Guo-Qing, Qin Fu-Wen, Huang Kai-Yu, Che De-Liang.The model of the magnetic mirror effect in the unbalanced magnetron sputtering ion beams. Acta Physica Sinica, 2005, 54(3): 1378-1384.doi:10.7498/aps.54.1378 |
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Gu Pei-Fu, Chen Hai-Xing, Zheng Zhen-Rong, Liu Xu.Determination of the extinction coefficient of a weakly absorbing multilayer system. Acta Physica Sinica, 2005, 54(8): 3722-3725.doi:10.7498/aps.54.3722 |
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Qi Hong- Ji, Yi Kui, He Hong- Bo, Shao Jian- Da.The effect of sputtering particle energy on surface characteristics of Mo thin films. Acta Physica Sinica, 2004, 53(12): 4398-4404.doi:10.7498/aps.53.4398 |
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XIAO DING-QUAN, WEI LI-FAN, LI ZI-SEN, ZHU JIAN-GUO, QIAN ZHENG-HONG, PENG WEN-BIN.MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING OF METAL OXIDE THIN FILMS (Ⅱ)——NUMERICAL CALCULATION AND RESULTS DISCUSSION. Acta Physica Sinica, 1996, 45(2): 345-352.doi:10.7498/aps.45.345 |
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XIAO DING-QUAN, WEI LI-FAN, LI ZI-SEN, ZHU JIAN-GUO, QIAN ZHENG-HONG, PENG WEN-BIN.MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING OF METAL OXIDE THIN FILMS (I)——ESTABLISHMENT OF THE MODEL. Acta Physica Sinica, 1996, 45(2): 330-338.doi:10.7498/aps.45.330 |
[20] |
WU ZHENG-YUN, HUANG QI-SHENG.THE METHOD OF FOCUSED Ga+ ION BEAM IMPLANTATION TO FABRICATE SEMICONDUCTOR QUANTUM WELL WIRE. Acta Physica Sinica, 1996, 45(3): 486-490.doi:10.7498/aps.45.486 |