[1] |
Gao Jian-Ying, Li Yu-Ge, Lei Ming-Kai.Plasma characteristics in deep oscillation magnetron sputtering of chromium target. Acta Physica Sinica, 2024, 73(16): 165201.doi:10.7498/aps.73.20240364 |
[2] |
Chen Long, Wang Di-Ya, Chen Jun-Yu, Duan Ping, Yang Ye-Hui, Tan Cong-Qi.Characteristics and suppression methods of low-frequency oscillation in Hall thruster. Acta Physica Sinica, 2023, 72(17): 175201.doi:10.7498/aps.72.20230680 |
[3] |
Fu Qiang, Wang Cong, Wang Yu-Fei, Chang Zheng-Shi.Comparative study on discharge characteristics of low pressure CO2driven by sinusoidal AC voltage: DBD and bare electrode structure. Acta Physica Sinica, 2022, 71(11): 115204.doi:10.7498/aps.71.20220086 |
[4] |
Li Ti-Jun, Cui Sui-Han, Liu Liang-Liang, Li Xiao-Yuan, Wu Zhong-Can, Ma Zheng-Yong, Ricky K. Y. Fu, Tian Xiu-Bo, Paul K. Chu, Wu Zhong-Zhen.Magnetic field optimization and high-power discharge characteristics of cylindrical sputtering cathode. Acta Physica Sinica, 2021, 70(4): 045202.doi:10.7498/aps.70.20201540 |
[5] |
Chen Chang-Zi, Ma Dong-Lin, Li Yan-Tao, Leng Yong-Xiang.Discharge model and plasma characteristics of high-power pulsed magnetron sputtering titanium target. Acta Physica Sinica, 2021, 70(18): 180701.doi:10.7498/aps.70.20202050 |
[6] |
Shen Yong-Qing, Zhang Zhi-Qiang, Liao Bin, Wu Xian-Ying, Zhang Xu, Hua Qing-Song, Bao Man-Yu.Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering technique. Acta Physica Sinica, 2020, 69(10): 108101.doi:10.7498/aps.69.20200021 |
[7] |
Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Chen Lei, Li Ti-Jun, Liu Liang-Liang, Ricky K Y Fu, Tian Xiu-Bo, Paul K Chu, Tan Wen-Chang.Simulation study on plasma discharge and transport in cylindrical cathode controlled by expanding electromagnetic field. Acta Physica Sinica, 2019, 68(19): 195204.doi:10.7498/aps.68.20190583 |
[8] |
Wang Tian-Long, Qiu Qing-Quan, Jing Li-Wei, Zhang Xiao-Bo.Design of circular composite sputtering cathode and simulation of its discharge characteristics. Acta Physica Sinica, 2018, 67(7): 070703.doi:10.7498/aps.67.20172576 |
[9] |
Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Paul K, Tan Wen-Chang, Pan Feng.Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical source. Acta Physica Sinica, 2017, 66(9): 095203.doi:10.7498/aps.66.095203 |
[10] |
Wu Zhong-Zhen, Tian Xiu-Bo, Pan Feng, Ricky K. Y. Fu, Paul K. Chu.Enhanced discharge of high power pulsed magnetron sputtering coupling with high voltage. Acta Physica Sinica, 2014, 63(18): 185207.doi:10.7498/aps.63.185207 |
[11] |
Wu Zhong-Zhen, Tian Xiu-Bo, Li Chun-Wei, Ricky K. Y., Fu, Pan Feng.Phasic discharge characteristics in high power pulsed magnetron sputtering. Acta Physica Sinica, 2014, 63(17): 175201.doi:10.7498/aps.63.175201 |
[12] |
Zhang Lian-Zhu, Meng Xiu-Lan, Zhang Su, Gao Shu-Xia, Zhao Guo-Ming.Simulation of N2 microhollow cathode discharge and cathode sputtering by using a PIC/MC model. Acta Physica Sinica, 2013, 62(7): 075201.doi:10.7498/aps.62.075201 |
[13] |
Shen Xiang-Qian, Xie Quan, Xiao Qing-Quan, Chen Qian, Feng Yun.Computer simulation of the glow discharge characteristics in magnetron sputtering. Acta Physica Sinica, 2012, 61(16): 165101.doi:10.7498/aps.61.165101 |
[14] |
Mu Zong-Xin, Mu Xiao-Dong, Wang Chun, Jia Li, Dong Chuang.Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current. Acta Physica Sinica, 2011, 60(1): 015204.doi:10.7498/aps.60.015204 |
[15] |
E Peng, Duan Ping, Wei Li-Qiu, Bai De-Yu, Jiang Bin-Hao, Xu Dian-Guo.Experimental study of vacuum backpressure on the discharge characteristics of a Hall thruster. Acta Physica Sinica, 2010, 59(12): 8676-8684.doi:10.7498/aps.59.8676 |
[16] |
E Peng, Duan Ping, Jiang Bin-Hao, Liu Hui, Wei Li-Qiu, Xu Dian-Guo.On the effect of magnetic field gradient on the discharge characteristics of Hall thrusters. Acta Physica Sinica, 2010, 59(10): 7182-7190.doi:10.7498/aps.59.7182 |
[17] |
Zhang Xin-Meng, Tian Xiu-Bo, Gong Chun-Zhi, Yang Shi-Qin.Discharge characteristics of confined cathode micro-arc oxidation. Acta Physica Sinica, 2010, 59(8): 5613-5619.doi:10.7498/aps.59.5613 |
[18] |
Xia Jun-Feng, Zhang Ye-Wen, Zheng Fei-Hu, Lei Qing-Quan.Numerical simulation of charge packet behavior in low-density polyethylene based on Gunn effect-like model. Acta Physica Sinica, 2010, 59(1): 508-514.doi:10.7498/aps.59.508 |
[19] |
E Peng, Han Ke, Wu Zhi-Wen, Yu Da-Ren.On the role of magnetic field intensity effects on the discharge characteristics of Hall thrusters. Acta Physica Sinica, 2009, 58(4): 2535-2542.doi:10.7498/aps.58.2535 |
[20] |
Ouyang Ji-Ting, He Feng, Miao Jin-Song, Feng Shuo.Study of characteristics of coplanar dielectric barrier discharge. Acta Physica Sinica, 2006, 55(11): 5969-5974.doi:10.7498/aps.55.5969 |