The interactions between incident particles and solids in ion implantation have been in-vestigated based on the generalized Langevin equation of classical dynamics. Considering an-harmonic effects of interactions among lattice atoms the energy exchange between incident particles and target atoms, the nuclear stopping power and the distributions of project ranges have been calculated numerically. The effect of the phonon spectra excited by the incident particles has been discussed also. All calculations are in good agreement with the results of the program TRIM88 in the low energy range.
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