is reported. The experiment shows that the aggregation mechanism of the silver atoms conforms to the two-stage growth model approximately when the substrate temperature changes. The fringe effect of the substrates was visible in the experiment and the coverage ratio of the silver atom clusters in the central region of the sample was smaller than that on the edge of the sample. As the nominal film thickness increased, the coverage ratio went up rapidly first, then its growth speed slowed down and finally the coverage ratio approached a saturation value. The film thickness corresponding to the saturation coverage ratio decreased obviously with the increase of the substrate temperature. For a fixed nominal film thickness, as the oil temperature increased, the coverage ratio decreased. The evolvement behavior of the average length of the silver aggregate branches is similar to that of the coverage ratio in the central region of the sample. The diffusion mechanism of the silver atomic clusters towards the sample edge is also presented.