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Fu Yu-Liang, Zhang Si-Yuan, Yang Jin-Yuan, Sun An-Bang, Wang Ya-Nan.Electron heating mode in magnetic field diffusion region of microwave discharge ion thruster. Acta Physica Sinica, 2024, 73(9): 095203.doi:10.7498/aps.73.20240017 |
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Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Lu Man-Ting, Xin Yu.Axial diagnosis of radio-frequency capacitively coupled Ar/O2plasma. Acta Physica Sinica, 2021, 70(11): 115204.doi:10.7498/aps.70.20202113 |
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Wang Li, Wen De-Qi, Tian Chong-Biao, Song Yuan-Hong, Wang You-Nian.Electron heating dynamics and plasma parameters control in capacitively coupled plasma. Acta Physica Sinica, 2021, 70(9): 095214.doi:10.7498/aps.70.20210473 |
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Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu.Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe. Acta Physica Sinica, 2020, 69(8): 085201.doi:10.7498/aps.69.20191864 |
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Yang Yu, Tang Cheng-Shuang, Zhao Yi-Fan, Yu Yi-Qing, Xin Yu.Electronegativity of capacitively coupled Ar+O2 plasma excited at very high frequency. Acta Physica Sinica, 2017, 66(18): 185202.doi:10.7498/aps.66.185202 |
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Liu Chao, Guan Yi-Bing, Zhang Ai-Bing, Zheng Xiang-Zhi, Sun Yue-Qiang.The ionosphere measurement technology of Langmuir probe on China seismo-electromagnetic satellite. Acta Physica Sinica, 2016, 65(18): 189401.doi:10.7498/aps.65.189401 |
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Wang Jun, Wang Tao, Tang Cheng-Shuang, Xin Yu.Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency. Acta Physica Sinica, 2016, 65(5): 055203.doi:10.7498/aps.65.055203 |
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Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian.Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2013, 62(20): 205208.doi:10.7498/aps.62.205208 |
[9] |
Li Yan-Yang, Yang Shi-E, Chen Yong-Sheng, Zhou Jian-Peng, Li Xin-Li, Lu Jing-Xiao.The study of capacitively-coupled hydrogen plasma at very high frequency. Acta Physica Sinica, 2012, 61(16): 165203.doi:10.7498/aps.61.165203 |
[10] |
Zou Shuai, Tang Zhong-Hua, Ji Liang-Liang, Su Xiao-Dong, Xin Yu.Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma. Acta Physica Sinica, 2012, 61(7): 075204.doi:10.7498/aps.61.075204 |
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Ding Yan-Li, Zhu Zhi-Li, Gu Jin-Hua, Shi Xin-Wei, Yang Shi-E, Gao Xiao-Yong, Chen Yong-Sheng, Lu Jing-Xiao.Effect of deposition rate on the scaling behavior of microcrystalline silicon films prepared by very high frequency-plasma enhanced chemical vapor deposition. Acta Physica Sinica, 2010, 59(2): 1190-1195.doi:10.7498/aps.59.1190 |
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Ge Hong, Zhang Xiao-Dan, Yue Qiang, Zhao Jing, Zhao Ying.Study of space voltage distribution between large-area parallel-plate electrodes for very high frequency plasma enhanced chemical vapor deposition. Acta Physica Sinica, 2008, 57(8): 5105-5110.doi:10.7498/aps.57.5105 |
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Yuan Qiang-Hua, Xin Yu, Huang Xiao-Jiang, Sun Kai, Ning Zhao-Yuan.Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasma. Acta Physica Sinica, 2008, 57(11): 7038-7043.doi:10.7498/aps.57.7038 |
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Xin Yu, Di Xiao-Lian, Yu Yi-Qing, Ning Zhao-Yuan.Generation of multi-source inductively coupled plasma and its diagnostics. Acta Physica Sinica, 2006, 55(7): 3494-3500.doi:10.7498/aps.55.3494 |
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Zhang Xiao-Dan, Zhao Ying, Gao Yan-Tao, Zhu Feng, Wei Chang-Chun, Sun Jian, Wang Yan, Geng Xin-Hua, Xiong Shao-Zhen.Study of microcrystalline silicon solar cells fabricated by very high frequency plasma-enhanced chemical vapor deposition. Acta Physica Sinica, 2005, 54(4): 1899-1903.doi:10.7498/aps.54.1899 |
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Yang Hui-Dong, Wu Chun-Ya, Zhao Ying, Xue Jun-Ming, Geng Xin-Hua, Xiong Shao-Zhen.Investigation on the oxygen contamination in the μc-Si∶H thin film deposited b y VHF-PECVD. Acta Physica Sinica, 2003, 52(11): 2865-2869.doi:10.7498/aps.52.2865 |
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GUAN WEI-SHU, WANG EN-YAO, CHENG SHI-QING, DUAN SHU-YUN, WANG JI-HAI, GU BIAO, SHANG ZHEN-KUI.EXPERIMENTAL INVESTIGATION ON PROPERTIES OF E. C. H. PLASMA AND HOT ELECTRON RING. Acta Physica Sinica, 1989, 38(2): 228-235.doi:10.7498/aps.38.228 |
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ZHU WEN-HAO, ZHU NAN-QIANG, CHEN YUE-SHAN.PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMA. Acta Physica Sinica, 1989, 38(2): 236-246.doi:10.7498/aps.38.236 |
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ZHU WEN-HAO, WU YI-FENG, CHEN YUE-SHAN.INFLUENCE OF THE HIGH FREQUENCY ELECTRIC FIELD ON THE PLASMA DIAGNOSTICS BY THE DOUBLE PROBE. Acta Physica Sinica, 1986, 35(11): 1426-1435.doi:10.7498/aps.35.1426 |
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CHEN YAN-PING, ZHOU YU-MEI.ECRH IN NON-THERMAL EQUILIBRIUM PLASMAS IN WEAKLY RELATIVISTIC REGIME. Acta Physica Sinica, 1984, 33(7): 1050-1057.doi:10.7498/aps.33.1050 |