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Fu Yu-Liang, Zhang Si-Yuan, Yang Jin-Yuan, Sun An-Bang, Wang Ya-Nan.Electron heating mode in magnetic field diffusion region of microwave discharge ion thruster. Acta Physica Sinica, 2024, 73(9): 095203.doi:10.7498/aps.73.20240017 |
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Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Lu Man-Ting, Xin Yu.Axial diagnosis of radio-frequency capacitively coupled Ar/O2plasma. Acta Physica Sinica, 2021, 70(11): 115204.doi:10.7498/aps.70.20202113 |
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Wang Li, Wen De-Qi, Tian Chong-Biao, Song Yuan-Hong, Wang You-Nian.Electron heating dynamics and plasma parameters control in capacitively coupled plasma. Acta Physica Sinica, 2021, 70(9): 095214.doi:10.7498/aps.70.20210473 |
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Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu.Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe. Acta Physica Sinica, 2020, 69(8): 085201.doi:10.7498/aps.69.20191864 |
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Yang Yu, Tang Cheng-Shuang, Zhao Yi-Fan, Yu Yi-Qing, Xin Yu.Electronegativity of capacitively coupled Ar+O2 plasma excited at very high frequency. Acta Physica Sinica, 2017, 66(18): 185202.doi:10.7498/aps.66.185202 |
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Liu Chao, Guan Yi-Bing, Zhang Ai-Bing, Zheng Xiang-Zhi, Sun Yue-Qiang.The ionosphere measurement technology of Langmuir probe on China seismo-electromagnetic satellite. Acta Physica Sinica, 2016, 65(18): 189401.doi:10.7498/aps.65.189401 |
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Wang Jun, Wang Tao, Tang Cheng-Shuang, Xin Yu.Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency. Acta Physica Sinica, 2016, 65(5): 055203.doi:10.7498/aps.65.055203 |
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Wang Chen, An Hong-Hai, Wang Wei, Fang Zhi-Heng, Jia Guo, Meng Xiang-Fu, Sun Jin-Ren, Liu Zheng-Kun, Fu Shao-Jun, Qiao Xiu-Mei, Zheng Wu-Di, Wang Shi-Ji.Diagnoses of Au plasma with soft X-ray double frequency grating interference technique. Acta Physica Sinica, 2014, 63(12): 125210.doi:10.7498/aps.63.125210 |
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Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian.Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2013, 62(20): 205208.doi:10.7498/aps.62.205208 |
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Jiang Xiang-Zhan, Liu Yong-Xin, Bi Zhen-Hua, Lu Wen-Qi, Wang You-Nian.Radial density uniformity of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2012, 61(1): 015204.doi:10.7498/aps.61.015204 |
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Zou Shuai, Tang Zhong-Hua, Ji Liang-Liang, Su Xiao-Dong, Xin Yu.Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma. Acta Physica Sinica, 2012, 61(7): 075204.doi:10.7498/aps.61.075204 |
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Sun Kai, Xin Yu, Huang Xiao-Jiang, Yuan Qiang-Hua, Ning Zhao-Yuan.Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF source. Acta Physica Sinica, 2008, 57(10): 6465-6470.doi:10.7498/aps.57.6465 |
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ZHU WEN-HAO, ZHU NAN-QIANG, CHEN YUE-SHAN.PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMA. Acta Physica Sinica, 1989, 38(2): 236-246.doi:10.7498/aps.38.236 |
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