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Song Liu-Qin, Jia Wen-Zhu, Dong Wan, Zhang Yi-Fan, Dai Zhong-Ling, Song Yuan-Hong.Numerical investigation of SiO2film deposition enhanced by capacitively coupled discharge plasma. Acta Physica Sinica, 2022, 71(17): 170201.doi:10.7498/aps.71.20220493 |
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Yang Meng-Sheng, Yi Tai-Min, Zheng Feng-Cheng, Tang Yong-Jian, Zhang Lin, Du Kai, Li Ning, Zhao Li-Ping, Ke Bo, Xing Pi-Feng.Surface oxidation of as-deposit uranium film characterized by X-ray photoelectron spectroscopy. Acta Physica Sinica, 2018, 67(2): 027301.doi:10.7498/aps.67.20172055 |
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Zhang Zeng-Yuan, Gao Xiao-Yong, Feng Hong-Liang, Ma Jiao-Min, Lu Jing-Xiao.Effect of the reactive pressure on the structure and optical properties of silver oxide films deposited by direct-current reactive magnetron sputtering. Acta Physica Sinica, 2011, 60(1): 016110.doi:10.7498/aps.60.016110 |
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Xia Zhi-Lin, Guo Pei-Tao, Xue Yi-Yu, Huang Cai-Hua, Li Zhan-Wang.Investigation of the plasma bursting process in short pulsed laser induced film damage. Acta Physica Sinica, 2010, 59(5): 3523-3530.doi:10.7498/aps.59.3523 |
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Yang Hang-Sheng, Nie An-Min, Zhang Jian-Ying.Recent progress in cubic boron nitride film synthesis. Acta Physica Sinica, 2009, 58(2): 1364-1370.doi:10.7498/aps.58.1364 |
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Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng.Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering. Acta Physica Sinica, 2008, 57(3): 1796-1801.doi:10.7498/aps.57.1796 |
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Deng Jin-Xiang, Wang Xu-Yang, Yao Qian, Zhou Tao, Zhang Xiao-Kang.Optical band gap of cubic boron nitride thin films deposited by sputtering. Acta Physica Sinica, 2008, 57(10): 6631-6635.doi:10.7498/aps.57.6631 |
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Chen Hao, Deng Jin-Xiang, Liu Jun-Kai, Zhou Tao, Zhang Yan, Chen Guang-Hua.Phase transformation in process of deposition of cubic boron nitride thin films. Acta Physica Sinica, 2007, 56(6): 3418-3427.doi:10.7498/aps.56.3418 |
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Yang Hang-Sheng.Surface growth mechanism of cubic boron nitride thin films prepared by plasma-enhanced chemical vapor deposition. Acta Physica Sinica, 2006, 55(8): 4238-4246.doi:10.7498/aps.55.4238 |
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Yu Wei, Wang Bao-Zhu, Yang Yan-Bin, Lu Wan-Bing, Fu Guang-Sheng.Optical emission diagnosis of helicon-wave-plasma-enhanced chemical vapor deposition of nanocrystalline silicon. Acta Physica Sinica, 2005, 54(5): 2394-2398.doi:10.7498/aps.54.2394 |
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Yu Wei, Liu Li-Hui, Hou Hai-Hong, Ding Xue-Cheng, Han Li, Fu Guang-Sheng.Silicon nitride films prepared by helicon wave plasam-enhanced chemical vapour deposition. Acta Physica Sinica, 2003, 52(3): 687-691.doi:10.7498/aps.52.687 |
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Cheng Shan-Hua, Ning Zhao-Yuan, Huang Feng.. Acta Physica Sinica, 2002, 51(3): 668-673.doi:10.7498/aps.51.668 |
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YE CHAO, NING ZHAO-YUAN, CHENG SHAN-HUA.OPTICAL PROPERTIES OF AMORPHOUS FLUORINATED CARBON FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA. Acta Physica Sinica, 2001, 50(10): 2017-2022.doi:10.7498/aps.50.2017 |
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CHEN BO, ZHENG ZHI-JIAN, DING YONG-KUN, LI SAN-WEI, WANG YAO-MEI.DETERMINATION OF ELECTRON TEMPERATURE IN LASER-PRODUCED PLASMAS BY ISOELECTRONIC XRAY SPECTROSCOPY. Acta Physica Sinica, 2001, 50(4): 711-714.doi:10.7498/aps.50.711 |
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CHEN GUANG-HUA, DENG JIN-XIANG, ZHANG SHENG-JUN, SONG XUE-MEI, WANG BO, YAN HUI.INFLUENCE OF SUBSTRATES ON THE FORMATION OF c-BN THIN FILMS. Acta Physica Sinica, 2001, 50(1): 83-87.doi:10.7498/aps.50.83 |
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TIAN JING-ZE, Lü FAN-XIU, XIA LI-FANG.DEPOSITION OF HIGH-QUALITY c-BN FILM ENHANCED BY PULSED DC BIAS TECHNIQUE. Acta Physica Sinica, 2001, 50(11): 2258-2262.doi:10.7498/aps.50.2258 |
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YANG GUO-HONG, ZHANG JI-YAN, ZHANG BAO-HAN, ZHOU YU-QING, LI JUN.ANALYSIS OF FINE STRUCTURE OF X-RAY SPECTRA FROM LASER-IRRADIATED GOLD DOT. Acta Physica Sinica, 2000, 49(12): 2389-2393.doi:10.7498/aps.49.2389 |
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ZHANG ZHI-HONG, GUO HUAI-XI, YU FEI-WEI, XIONG QI-HUA, YE MING-SHENG, FAN XIANG-JUN.PREPARATION OF CUBIC C3N4 THIN FILMS BY LOW-PRESSURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica, 1998, 47(6): 1047-1051.doi:10.7498/aps.47.1047 |
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PEI WEN-BING, CHANG TIE-QIANG, ZHANG JUN.INVESTIGATION ON NON-EQUILIBRIUM X-RAY EMISSION SPECTRA FROM LASER PRODUCED PLASMAS. Acta Physica Sinica, 1995, 44(11): 1766-1775.doi:10.7498/aps.44.1766 |
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MA GUO-BIN, TAN WEI-HAN.SOFT X-RAY LASER IN EXPANSION PLASMA PUMPING BY SHORT PULSED LASER. Acta Physica Sinica, 1994, 43(6): 942-949.doi:10.7498/aps.43.942 |
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