A novel microstructure of flexible substrate/graphene/ZnO nanowires/graphene multilayer film for harvesting weak energy is for the first time presented as far as we know in this paper. First, the design of this microstructure and its operational principle is discussed theoretically. Next, we study the key technology in the preparation process of this microstructure and carry out the whole preparation process. Finally, the microstructure is successfully achieved and tested. Results show that the output voltage of the microstructure can be up to several hundreds of millivolt. In a word, the theoretical and experimental research of this microstructure provides a basis for self-powered micro-nano systems, and is significant to the practical development of the integrated micro-nano systems.