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Abstract

Over the past decade, there have been increasing demand on and interest in high performance single photon detectors in many new applications in quantum information technology. Compared with conventional single photon detectors, superconducting transition edge sensor (TES) based single photon detectors have great advantages in the performance of detection efficiency, energy resolution, photon number resolving capability, dark count rate, etc. They have been successfully used in quantum optics experiments and quantum key distribution systems, and they will play a more important role in the research field of quantum information science and technology. In this paper we review the operating principle, fabrication process, performance, measurement system and the research progress on superconducting TES based single photon detectors.

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Funds:Project supported by the National Basic Research Program of China (Grant No. 2011CBA00304) and the Tsinghua University Initiative Scientific Research Program, China (Grant No. 20131089314).

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Vol. 63, Issue 20 - 2014-10-20

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