| [1] |
Tong Lei, Zhao Ming-Liang, Zhang Yu-Ru, Song Yuan-Hong, Wang You-Nian. Hybrid simulation of radio frequency biased inductively coupled Ar/O2/Cl2 plasmas. Acta Physica Sinica,
2024, 73(4): 045201.
doi: 10.7498/aps.73.20231369
|
| [2] |
Zhang Yu-Han, Zhao Xin-Qian, Liang Ying-Shuang, Guo Yuan-Yuan. Numerical simulation of inductively coupled Ar/O2 plasma. Acta Physica Sinica,
2024, 73(13): 135201.
doi: 10.7498/aps.73.20240436
|
| [3] |
Duan Meng-Yue, Jia Wen-Zhu, Zhang Ying-Ying, Zhang Yi-Fan, Song Yuan-Hong. Two-dimensional fluid simulation of spatial distribution of dust particles in a capacitively coupled silane plasma. Acta Physica Sinica,
2023, 72(16): 165202.
doi: 10.7498/aps.72.20230686
|
| [4] |
Song Liu-Qin, Jia Wen-Zhu, Dong Wan, Zhang Yi-Fan, Dai Zhong-Ling, Song Yuan-Hong. Numerical investigation of SiO2 film deposition enhanced by capacitively coupled discharge plasma. Acta Physica Sinica,
2022, 71(17): 170201.
doi: 10.7498/aps.71.20220493
|
| [5] |
Wang Li, Wen De-Qi, Tian Chong-Biao, Song Yuan-Hong, Wang You-Nian. Electron heating dynamics and plasma parameters control in capacitively coupled plasma. Acta Physica Sinica,
2021, 70(9): 095214.
doi: 10.7498/aps.70.20210473
|
| [6] |
Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Lu Man-Ting, Xin Yu. Axial diagnosis of radio-frequency capacitively coupled Ar/O2 plasma. Acta Physica Sinica,
2021, 70(11): 115204.
doi: 10.7498/aps.70.20202113
|
| [7] |
Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu. Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe. Acta Physica Sinica,
2020, 69(8): 085201.
doi: 10.7498/aps.69.20191864
|
| [8] |
Sun An-Bang, Li Han-Wei, Xu Peng, Zhang Guan-Jun. Monte Carlo simulations of electron transport coefficients in low temperature streamer discharge plasmas. Acta Physica Sinica,
2017, 66(19): 195101.
doi: 10.7498/aps.66.195101
|
| [9] |
Yang Yu, Tang Cheng-Shuang, Zhao Yi-Fan, Yu Yi-Qing, Xin Yu. Electronegativity of capacitively coupled Ar+O2 plasma excited at very high frequency. Acta Physica Sinica,
2017, 66(18): 185202.
doi: 10.7498/aps.66.185202
|
| [10] |
Feng Zhi-Xing, Ning Cheng, Xue Chuang, Li Bai-Wen. Physical investigation of dynamic process of the gas-puff Z-pinch through particle-in-cell simulation. Acta Physica Sinica,
2014, 63(18): 185203.
doi: 10.7498/aps.63.185203
|
| [11] |
Hao Ying-Ying, Meng Xiu-Lan, Yao Fu-Bao, Zhao Guo-Ming, Wang Jing, Zhang Lian-Zhu. Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo model. Acta Physica Sinica,
2014, 63(18): 185205.
doi: 10.7498/aps.63.185205
|
| [12] |
Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian. Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma. Acta Physica Sinica,
2013, 62(20): 205208.
doi: 10.7498/aps.62.205208
|
| [13] |
Yang Chao, Long Ji-Dong, Wang Ping, Liao Fang-Yan, Xia Meng-Zhong, Liu La-Qun. The full three-dimensional electromagnetic PIC/MCC numerical algorithm research of Penning ion source discharge. Acta Physica Sinica,
2013, 62(20): 205207.
doi: 10.7498/aps.62.205207
|
| [14] |
Zheng Shi-Jian, Ding Fang, Xie Xin-Hua, Tang Zhong-Liang, Zhang Yi-Chuan, Li Huan, Yang Kuan, Zhu Xiao-Dong. A diagnosis of gas-phase processes in a high pressure DC CH4/H2 plasma. Acta Physica Sinica,
2013, 62(16): 165204.
doi: 10.7498/aps.62.165204
|
| [15] |
Hong Bu-Shuang, Yuan Tao, Zou Shuai, Tang Zhong-Hua, Xu Dong-Sheng, Yu Yi-Qing, Wang Xu-Sheng, Xin Yu. Influence of addifion of electronegative gases on the properties of capacitively coupled Ar plasmas. Acta Physica Sinica,
2013, 62(11): 115202.
doi: 10.7498/aps.62.115202
|
| [16] |
Jiang Xiang-Zhan, Liu Yong-Xin, Bi Zhen-Hua, Lu Wen-Qi, Wang You-Nian. Radial density uniformity of dual frequency capacitively coupled plasma. Acta Physica Sinica,
2012, 61(1): 015204.
doi: 10.7498/aps.61.015204
|
| [17] |
Jin Xiao-Lin, Huang Tao, Liao Ping, Yang Zhong-Hai. The particle-in-cell simulation and Monte Carlo collision simulation of the interaction between electrons and microwave in electron cyclotron resonance discharge. Acta Physica Sinica,
2009, 58(8): 5526-5531.
doi: 10.7498/aps.58.5526
|
| [18] |
Huang Song, Xin Yu, NingZhao-Yuan. Studies on C22 radical by optical emission spectroscopy in an induc tively-coupled CF44/CH44 plasma. Acta Physica Sinica,
2005, 54(4): 1653-1658.
doi: 10.7498/aps.54.1653
|
| [19] |
MA YAN-YUN, CHANG WEN-WEI, YIN YAN, YUE ZONG-WU, CAO LI-HUA, LIU DA-QING. A COLLISION MODEL IN PLASMA PARTICLE SIMULATIONS. Acta Physica Sinica,
2000, 49(8): 1513-1519.
doi: 10.7498/aps.49.1513
|
| [20] |
Wang De-Zhen, Ma Teng-Cai, Gong Ye. . Acta Physica Sinica,
1995, 44(6): 877-884.
doi: 10.7498/aps.44.877
|