[1] |
Tong Lei, Zhao Ming-Liang, Zhang Yu-Ru, Song Yuan-Hong, Wang You-Nian.Hybrid simulation of radio frequency biased inductively coupled Ar/O2/Cl2plasmas. Acta Physica Sinica, 2024, 73(4): 045201.doi:10.7498/aps.73.20231369 |
[2] |
Zhang Yu-Han, Zhao Xin-Qian, Liang Ying-Shuang, Guo Yuan-Yuan.Numerical simulation of inductively coupled Ar/O2plasma. Acta Physica Sinica, 2024, 73(13): 135201.doi:10.7498/aps.73.20240436 |
[3] |
Wang Li, Wen De-Qi, Tian Chong-Biao, Song Yuan-Hong, Wang You-Nian.Electron heating dynamics and plasma parameters control in capacitively coupled plasma. Acta Physica Sinica, 2021, 70(9): 095214.doi:10.7498/aps.70.20210473 |
[4] |
Niu Yue, Bao Wei-Min, Li Xiao-Ping, Liu Yan-Ming, Liu Dong-Lin.Numerical simulation and experimental study of high-power thermal equilibrium inductively coupled plasma. Acta Physica Sinica, 2021, 70(9): 095204.doi:10.7498/aps.70.20201610 |
[5] |
Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu.Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe. Acta Physica Sinica, 2020, 69(8): 085201.doi:10.7498/aps.69.20191864 |
[6] |
Yu Ming-Hao.Numerical investigation on interaction mechanisms between flow field and electromagnetic field for nonequilibrium inductively coupled plasma. Acta Physica Sinica, 2019, 68(18): 185202.doi:10.7498/aps.68.20190865 |
[7] |
Wang Jun, Wang Tao, Tang Cheng-Shuang, Xin Yu.Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency. Acta Physica Sinica, 2016, 65(5): 055203.doi:10.7498/aps.65.055203 |
[8] |
Zhou Qian-Hong, Dong Zhi-Wei.Theoretical study on the electron energy distribution function of weakly ionized air plasma. Acta Physica Sinica, 2013, 62(1): 015201.doi:10.7498/aps.62.015201 |
[9] |
Zou Shuai, Tang Zhong-Hua, Ji Liang-Liang, Su Xiao-Dong, Xin Yu.Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma. Acta Physica Sinica, 2012, 61(7): 075204.doi:10.7498/aps.61.075204 |
[10] |
Hong Xiao-Gang, Xu Wen-Dong, Li Xiao-Gang, Zhao Cheng-Qiang, Tang Xiao-Dong.Numerical simulation of probe induced surface plasmon resonance coupling nanolithography. Acta Physica Sinica, 2008, 57(10): 6643-6648.doi:10.7498/aps.57.6643 |
[11] |
Sun Kai, Xin Yu, Huang Xiao-Jiang, Yuan Qiang-Hua, Ning Zhao-Yuan.Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF source. Acta Physica Sinica, 2008, 57(10): 6465-6470.doi:10.7498/aps.57.6465 |
[12] |
Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng.Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering. Acta Physica Sinica, 2008, 57(3): 1796-1801.doi:10.7498/aps.57.1796 |
[13] |
Ma Xiao-Tao, Zheng Wan-Hua, Ren Gang, Fan Zhong-Chao, Chen Liang-Hui.Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal. Acta Physica Sinica, 2007, 56(2): 977-981.doi:10.7498/aps.56.977 |
[14] |
Di Xiao-Lian, Xin Yu, Ning Zhao-Yuan.Effect of antenna configuration on power transfer efficiency for planar inductively coupled plasmas. Acta Physica Sinica, 2006, 55(10): 5311-5317.doi:10.7498/aps.55.5311 |
[15] |
Huang Song, Xin Yu, NingZhao-Yuan.Studies on C22 radical by optical emission spectroscopy in an induc tively-coupled CF44/CH44 plasma. Acta Physica Sinica, 2005, 54(4): 1653-1658.doi:10.7498/aps.54.1653 |
[16] |
Huang Song, Ning Zhao-Yuan, Xin Yu, Gan Zhao-Qiang.Characteristics of two-electron-temperature in inductively coupled CF4 plasmas. Acta Physica Sinica, 2004, 53(10): 3394-3397.doi:10.7498/aps.53.3394 |
[17] |
Wang Qi, Chen Jian-Xin, Xia Yuan-Qin, Chen De-Ying.. Acta Physica Sinica, 2002, 51(5): 1035-1039.doi:10.7498/aps.51.1035 |
[18] |
CHI LING-FEI, LIN KUI-XUN, YAO RUO-HE, LIN XUAN-YING, YU CHU-YING, YU YUN-PENG.DIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE AND ITS NUMERICAL PROCESSING. Acta Physica Sinica, 2001, 50(7): 1313-1317.doi:10.7498/aps.50.1313 |
[19] |
YAO RUO-HE, CHI LING-FEI, LIN XUAN-YING, SHI WANG-ZHOU, LIN KUI-XUN.THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESS. Acta Physica Sinica, 2000, 49(5): 922-925.doi:10.7498/aps.49.922 |
[20] |
ZHU WEN-HAO, ZHU NAN-QIANG, CHEN YUE-SHAN.PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMA. Acta Physica Sinica, 1989, 38(2): 236-246.doi:10.7498/aps.38.236 |